OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 14 — Jul. 10, 2006
  • pp: 6469–6478

Flat spectral response silicon arrayed waveguide gratings via ion implantation

Soon Thor Lim, Ching Eng Png, Seong Phun Chan, and Graham T. Reed  »View Author Affiliations


Optics Express, Vol. 14, Issue 14, pp. 6469-6478 (2006)
http://dx.doi.org/10.1364/OE.14.006469


View Full Text Article

Enhanced HTML    Acrobat PDF (438 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A flat spectral response has long been a requirement in photonic networking. In order to find a low cost alternative compared to some other technologies, a novel method is demonstrated to achieve such a response in silicon-on-insulator arrayed waveguide gratings (AWG) through free carrier absorption, implemented by ion implantation of dopant species. The AWG is designed using 1.5µm Si-overlayer on an SOI wafer utilising rib waveguides with a width of 1.1µm and an etch-depth of 0.88µm to facilitate the singlemode, birefringence-free operation. It is also essential to achieve a uniform dopant concentration throughout the guiding region to avoid any phase errors resulting from the free carriers. This can be achieved using multiple ion implantation steps. Both n and p type dopants are investigated and results showed significant reduction of doping length is achieved by using n-type dopant as compared to a p-type dopants. The broadened passband is measured to be 0.5nm, a 5 times broadening from the Gaussian peak.

© 2006 Optical Society of America

OCIS Codes
(040.6040) Detectors : Silicon

ToC Category:
Integrated Optics

History
Original Manuscript: May 11, 2006
Revised Manuscript: June 8, 2006
Manuscript Accepted: June 12, 2006
Published: July 10, 2006

Citation
Soon T. Lim, Ching E. Png, Seong P. Chan, and Graham T. Reed, "Flat spectral response silicon arrayed waveguide gratings via ion implantation," Opt. Express 14, 6469-6478 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-14-6469


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. K. Okamoto and H. Yamada, "Arrayed-waveguide grating multiplexer with flat spectral response," Opt. Lett. 20, 43-45 (1995). [CrossRef] [PubMed]
  2. K. Okamoto and A. Sugita, "Flat spectral response arrayed-waveguide grating multiplexer with Parabolic waveguides horns," Electron. Lett. 32, 1661-1662 (1996). [CrossRef]
  3. M. R. Amersfoot, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel and C. Caneau, "Passband broadening of integrated arrayed waveguide filters using multimode interference couplers," Electron. Lett. 32, 449-451 (1996). [CrossRef]
  4. Y. P. Ho and Y. J. Chen, "Flat channel-passband-wavelength multiplexing and demultiplexing devices by multiple-Rowland-Circle Design," IEEE Photon. Technol. Lett. 9, 342-344 (1997). [CrossRef]
  5. S. P. Chan, C. E. Png, S. T. Lim, G. T. Reed, V. M. N. Passaro, "Single mode and polarisation independent silicon-on-insulator waveguides with small cross section," J. Lightwave Technol. 23, 2103-2111 (2005). [CrossRef]
  6. BeamPROP, Rsoft, Inc. Research Software, Ossininh NY.
  7. Amersfoot, "http://www.c2v.nl/products/software/support/files/A1998003B.pdf"
  8. J. W. Goodman, Introduction to Fourier Optics in Classic Textbook Reissue Series. (New York: McGraw-Hill, 1998), Chap. 5, pp.83-90.
  9. P. Munoz, D. Pastor and J. Capmany, "Modeling and design of arrayed waveguide gratings," J. Lightwave Technol. 20, 661-674 (2002). [CrossRef]
  10. R. A. Soref and B. R. Bennett, "Electro optical effects in silicon," IEEE J. Quantum Electron. QE-23, (1987).
  11. D. Plummer and P. B. Griffin, "Material and Process Limits in Silicon VLSI Technology," Proceedings of THE IEEE. 89, 240-258, (2001) [CrossRef]
  12. SILVACO International, 4701, Patrick Henry Drive, Blg 1, Santa Clara, California.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited