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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 17 — Aug. 21, 2006
  • pp: 7943–7953

Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa, and Shigeki Matsuo  »View Author Affiliations


Optics Express, Vol. 14, Issue 17, pp. 7943-7953 (2006)
http://dx.doi.org/10.1364/OE.14.007943


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Abstract

Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).

© 2006 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(160.5470) Materials : Polymers
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: May 31, 2006
Revised Manuscript: August 10, 2006
Manuscript Accepted: August 12, 2006
Published: August 21, 2006

Virtual Issues
Vol. 1, Iss. 9 Virtual Journal for Biomedical Optics

Citation
Hiroaki Misawa, Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, and Shigeki Matsuo, "Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8," Opt. Express 14, 7943-7953 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-17-7943


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