Large amplitude wavefront generation and correction with membrane mirrors

doi:10.1364/OPEX.14.000509

Optics Express

Editor: Michael Duncan
Vol. 14, Iss. 2 — Jan. 23, 2006
pp: 509–517

Large amplitude wavefront generation and correction with membrane mirrors

Peter Kurczynski, Harold M. Dyson, and Bernard Sadoulet »View Author Affiliations

Optics Express, Vol. 14, Issue 2, pp. 509-517 (2006)
http://dx.doi.org/10.1364/OPEX.14.000509

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Abstract
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Abstract

Membrane mirror devices presented here are capable of large amplitude deformation for wavefront generation and correction in adaptive optics. These devices consist of micro-fabricated membranes that are actuated by an underlying electrode array and a transparent counter-electrode. Deformations of +/- 20 μm optical are demonstrated for low order deformations and 10 μm optical for high order Zernike polynomial wavefront generation. Large deformation at low voltage is enabled by the use of low stress membranes, relatively small membrane-electrode separation and the transparent counter-electrode.

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(010.1330) Atmospheric and oceanic optics : Atmospheric turbulence
(170.4460) Medical optics and biotechnology : Ophthalmic optics and devices
(230.4000) Optical devices : Microstructure fabrication
(230.6120) Optical devices : Spatial light modulators

ToC Category:
Adaptive Optics

Virtual Issues
Vol. 1, Iss. 2 Virtual Journal for Biomedical Optics

Citation
Peter Kurczynski, Harold M. Dyson, and Bernard Sadoulet, "Large amplitude wavefront generation and correction with membrane mirrors," Opt. Express 14, 509-517 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-2-509

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References

Marc Séchaud, "Wave-front compensation devices," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999). [CrossRef]
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L. Zhu et al., "Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation," Appl. Opt. 38, 168-178 (1999). [CrossRef]
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Pierre-Yves Madec, "Control techniques," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999).
J.C.Wyant and K. Creath, "Basic Wavefront Aberration Theory for Optical Metrology" in Applied Optics and Optical Engineering, J. C. Wyant and R. R. Shannon, eds. (Academic, New York, NY 1992).
P. Kurczynski and B. Sadoulet are preparing a manuscript to be called "Stability of Electrostatic Actuated Membrane Mirror Devices."

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