Dispersion-free absolute interferometry based on angular spectrum scanning
Optics Express, Vol. 14, Issue 2, pp. 655-663 (2006)
http://dx.doi.org/10.1364/OPEX.14.000655
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Abstract
As an alternative to the conventional optical frequency scanning technique, an angular spectrum scanning technique is proposed for absolute interferometry. Instead of sweeping the optical frequency over a wide range of spectrum, we sweep the angular spectrum by changing the incident angle of a monochromatic plane wave with a spatial light modulator (SLM). The use of monochromatic light combined with the SLM enables dispersion-free absolute interferometry that is free from mechanical moving components.
© 2006 Optical Society of America
OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
Citation
Zhihui Duan, Yoko Miyamoto, and Mitsuo Takeda, "Dispersion-free absolute interferometry based on angular spectrum scanning," Opt. Express 14, 655-663 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-2-655
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