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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 2 — Jan. 23, 2006
  • pp: 655–663

Dispersion-free absolute interferometry based on angular spectrum scanning

Zhihui Duan, Yoko Miyamoto, and Mitsuo Takeda  »View Author Affiliations

Optics Express, Vol. 14, Issue 2, pp. 655-663 (2006)

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As an alternative to the conventional optical frequency scanning technique, an angular spectrum scanning technique is proposed for absolute interferometry. Instead of sweeping the optical frequency over a wide range of spectrum, we sweep the angular spectrum by changing the incident angle of a monochromatic plane wave with a spatial light modulator (SLM). The use of monochromatic light combined with the SLM enables dispersion-free absolute interferometry that is free from mechanical moving components.

© 2006 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Zhihui Duan, Yoko Miyamoto, and Mitsuo Takeda, "Dispersion-free absolute interferometry based on angular spectrum scanning," Opt. Express 14, 655-663 (2006)

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