OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 2 — Jan. 23, 2006
  • pp: 810–816

Optics InfoBase > Optics Express > Volume 14 > Issue 2 > Page 810

Micro lens fabrication by means of femtosecond two photon photopolymerization

Rui Guo, Shizhou Xiao, Xiaomin Zhai, Jiawen Li, Andong Xia, and Wenhao Huang  »View Author Affiliations


Optics Express, Vol. 14, Issue 2, pp. 810-816 (2006)
http://dx.doi.org/10.1364/OPEX.14.000810


View Full Text Article

Enhanced HTML    Acrobat PDF (1199 KB)


Advanced Search

Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report the fabrication of micro lens using an alternative annular scanning mode with continuous variable layer thickness by two-photon polymerization after multi-parameter optimization. Laser scanning mode and scanning pace parameter are optimized to achieve good appearance. As examples of the results, a 2 × 2 micro spherical lens array with diameter of 15 μm and a micro Fresnel lens with diameter of 17 μm are fabricated. Their optical performances are also tested. Compared to the conventional femtosecond two-photon fabrication, this work provides an alternative, effective and cheap processing method for the fabrication of micro optic device that requires arbitrary shape with high surface quality and small scale.

© 2006 Optical Society of America

OCIS Codes
(130.1750) Integrated optics : Components
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(320.7090) Ultrafast optics : Ultrafast lasers
(350.3950) Other areas of optics : Micro-optics

ToC Category:
Optical Design and Fabrication

Citation
Rui Guo, Shizhou Xiao, Xiaomin Zhai, Jiawen Li, Andong Xia, and Wenhao Huang, "Micro lens fabrication by means of femtosecond two photon photopolymerization," Opt. Express 14, 810-816 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-2-810


Sort:  Journal  |  Reset  

References

  1. T. J. Suleskiand and R. D. TeKolste," Fabrication Trends for Free-Space Microoptics," J. Lightwave Technol. 23, 633 (2005) [CrossRef]
  2. P. Nussbaum, R. Völkel, H. P. Herzig, M. Eisner and S. Haselbeck," Design, fabrication and testing of microlens arrays for sensors and Microsystems," Pure Appl. Opt. 6, 617 (1997) [CrossRef]
  3. S. Sugiyama, S. Khumpuang and G. Kawaguchi," Plain-pattern to cross-section transfer (PCT) technique for deep x-ray lithography and applications," J. Micromech. Microeng. 14,1399 (2004) [CrossRef]
  4. J. Yao, Z. Cui, F. Gao, Y. Zhang, Y. Guo, C. Du, H. Zeng and C. Qiu," Refractive micro lens array made of dichromate gelatin with gray-tone photolithography," Microelectron. Eng. 57-58, 729 (2001) [CrossRef]
  5. M. He, X. C. Yuan, N. Q. Ngo, J. Bu and S. H. Tao," Single-step fabrication of a microlens array in sol-gel material by direct laser writing and its application in optical coupling," J. Opt. A: Pure Appl. Opt. 6, 94 (2004). [CrossRef]
  6. S. Kawata, H. B. Sun, T. Tanaka and K. Takada," Finer features for functional microdevices," Nature 412, 697 (2001). [CrossRef] [PubMed]
  7. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X. L. Wu, S. R. Marder and J. W. Perry," Two-photon polymerization initiators for threedimensional optical data storage and microfabrication," Nature 398, 51 (1999). [CrossRef]
  8. Z. W. Jiang, Y. J. Zhou, D. J. Yuan, W. H. Huang and A. D. Xia," A Two-Photon Femtosecond Laser System for Three-Dimensional Microfabrication and Data Storage," Chin. Phys. Lett. 20, 2126 (2003). [CrossRef]
  9. R. Guo, Z. Y. Li,Z. W. Jiang, D. J. Yuan, W. H. Huang and A. D. Xia," Log-pile photonic crystal fabricated by two-photon photopolymerization," J. Opt. A: Pure Appl. Opt. 7, 396 (2005) [CrossRef]
  10. H. B. Sun, M. Maeda, K. Takada, James W. M. Chon, M. Gu and S. Kawata," Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization," Appl. Phys. Lett. 83, 819 (2003). [CrossRef]
  11. J. Serbin and B. Chichkov," High-resolution direct-write femtosecond laser technologies," in Solid State Laser Technologies and Femtosecond Phenomena, Jonathan A. C. Terry, W. Andrew Clarkson, eds. Proc. SPIE 5620, 245-251 (2004). [CrossRef]
  12. V. R. Bhardwaj, P. B. Corkum, D. M. Rayner, C. Hnatovsky, E. Simova and R. S. Taylor," Stress in femtosecond-laser-written waveguides in fused silica," Opt.Lett. 29, 1312 (2004) [CrossRef] [PubMed]
  13. N. Takeshima, Y. Narita, S. Tanaka, Y. Kuroiwa, K. Hirao," Fabrication of high-efficiency diffraction gratings in glass," Opt.Lett. 30, 352 (2005) [CrossRef] [PubMed]
  14. Q. Z. Zhao, J. R. Qiu, X. W. Jiang, E. W. Dai, C. H. Zhou and C. S. Zhu," Direct writing computer-generated holograms on metal film by an infrared femtosecond laser," Opt. Express 13, 2089 (2005). [CrossRef] [PubMed]
  15. H. B. Sun, S. Matsuo and H. Misawa," Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin," Appl. Phys. Lett. 74, 786 (1999). [CrossRef]
  16. K. Kaneko, H. B. Sun, X. M. Duan and S. Kawata," Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication," Appl. Phys. Lett. 83, 2091 (2003). [CrossRef]
  17. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch and C. M. Soukoulis," Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nature Mater. 3, 444 (2004). [CrossRef]
  18. J. Serbin, A. Ovsianikov, and B. Chichkov," Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties," Opt.Express 12, 5221 (2004). [CrossRef] [PubMed]
  19. H. F. Jiu, H. H. Tang, J. L. Zhou, J. Xu, Q. J. Zhang, H. Xing, W. H. Huang and A. D. Xia,"Sm(DBM)3Phen-doped poly(methyl methacrylate) for three-dimensional multilayered optical memory," Opt. Lett. 30, 774 (2005) [CrossRef] [PubMed]
  20. J. Kato, N. Takeyasu, Y. Adachi, H. B. Sun, and S. Kawata," Multiple-spot parallel processing for laser micronanofabrication," Appl. Phys. Lett. 86, 044102 (2005) [CrossRef]
  21. M. Straub, M. Ventura, and M. Gu," Multiple Higher-Order Stop Gaps in Infrared Polymer Photonic Crystals,"Phys. Rev. Lett. 91, 043901 (2003) [CrossRef] [PubMed]
  22. N. Takeshima, Y.Narita, T. Nagata, S. Tanaka and K. Hirao," Fabrication of photonic crystals in ZnS-doped glass," Opt.Lett. 30,537 (2005) [CrossRef] [PubMed]
  23. K. Takada, H. B. Sun, and S. Kawata," Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting," Appl. Phys. Lett. 86, 071122 (2005). [CrossRef]
  24. R. Guo,S. Z. Xiao,H. Xing,W. H. Huang and A. D. Xia," Effect of overlapping degree to surface roughness in a femtosecond laser micro fabrication," Photonics China 6, 9 (2004)
  25. W . Watanabe, D. Kuroda, K . Itoh and J. Nishii," Fabrication of Fresnel zone plate embedded in silica glass by femtosecond laser pulses," Opt. Express 10, 9 78 (2002). [PubMed]
  26. M. Born and E. Wolf, Principles of Optics (Cambridge, 1999).
  27. H. Nishihara and T. Suhara,Micro Fresnel Lenses Progress in Optics (Elsevier Science, Amsterdam, 1987).
  28. D. F. Vanderwerf," Ghost-image analysis of Fresnel lens doublet," in Stray Radiation in Optical Systems, Robert P. Breault, eds. Proc. SPIE 1331, 143-157 (1990) [CrossRef]

Cited By

 Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited