Azimuthal position error correction algorithm for absolute test of large optical surfaces
Optics Express, Vol. 14, Issue 20, pp. 9169-9177 (2006)
http://dx.doi.org/10.1364/OE.14.009169
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Abstract
Absolute test needs test part rotation to separate errors of the interferometer itself from errors due to the test surfaces. At this time, previous absolute test algorithms assume no azimuthal position error during part rotation. For large optics whose diameters are 0.6 m and over, however, exact rotations are physically difficult. Motivated by this, we propose a new algorithm that adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates testing errors caused by rotation inaccuracy.
© 2006 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 22, 2006
Revised Manuscript: September 14, 2006
Manuscript Accepted: September 21, 2006
Published: October 2, 2006
Citation
Hyug-Gyo Rhee, Yun-Woo Lee, and Seung-Woo Kim, "Azimuthal position error correction algorithm for absolute test of large optical surfaces," Opt. Express 14, 9169-9177 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-20-9169
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