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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 20 — Oct. 2, 2006
  • pp: 9169–9177

Azimuthal position error correction algorithm for absolute test of large optical surfaces

Hyug-Gyo Rhee, Yun-Woo Lee, and Seung-Woo Kim  »View Author Affiliations


Optics Express, Vol. 14, Issue 20, pp. 9169-9177 (2006)
http://dx.doi.org/10.1364/OE.14.009169


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Abstract

Absolute test needs test part rotation to separate errors of the interferometer itself from errors due to the test surfaces. At this time, previous absolute test algorithms assume no azimuthal position error during part rotation. For large optics whose diameters are 0.6 m and over, however, exact rotations are physically difficult. Motivated by this, we propose a new algorithm that adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates testing errors caused by rotation inaccuracy.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 22, 2006
Revised Manuscript: September 14, 2006
Manuscript Accepted: September 21, 2006
Published: October 2, 2006

Citation
Hyug-Gyo Rhee, Yun-Woo Lee, and Seung-Woo Kim, "Azimuthal position error correction algorithm for absolute test of large optical surfaces," Opt. Express 14, 9169-9177 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-20-9169


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References

  1. D. Malacara, "Phase shifting interferometry," in Optical Shop Testing, 2nd ed., (Wiley, New York, 1992), Chap.14.
  2. A. E. Jensen, "Absolute calibration method for laser Twyman-Green wave-front testing interferometers," J. Opt. Soc. Am. 63, 1313A (1973).
  3. K. L. Shu, "Ray-trace analysis and data reduction methods for the Ritchey-Common test," Appl. Opt. 22, 1879-1886 (1983). [CrossRef] [PubMed]
  4. B. S. Fritz, "Absolute calibration of an optical flat," Opt. Eng. 23, 379-383 (1984).
  5. K.-E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, "Absolute sphericity measurement," Appl. Opt. 28, 4649-4661 (1989). [CrossRef] [PubMed]
  6. G. Shulz and J. Grzanna, "Absolute flatness testing by the rotation method with optimal measuring error compensation," Appl. Opt. 31, 3767-3780 (1992). [CrossRef]
  7. C. Ai and J. C. Wyant, "Absolute testing of flats using even and odd functions," Appl. Opt. 32, 4698-4703 (1993). [CrossRef] [PubMed]
  8. C. Evans, R. Kestner, "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996). [CrossRef] [PubMed]
  9. P. Hariharan, "Interferometric testing of optical surfaces: absolute measurement of flatness," Opt. Eng. 36, 2478-2481 (1997). [CrossRef]
  10. W. T. Estler, C. J. Evans, and L. Z. Shao, "Uncertainty estimation for multi-position form error metrology," Prec. Eng. 21, 72-82 (1997). [CrossRef]
  11. R. E. Parks, L. Shao, and C. J. Evans, "Pixel-based absolute topography test for three flats," Appl. Opt. 37, 5951-5956 (1998). [CrossRef]
  12. V. Greco, R. Tronconi, C. D. Vecchio, M. Trivi, and G. Molesini, "Absolute measurement of planarity with Fritz’s method: uncertainty evaluation," Appl. Opt. 38, 2018-2027 (1999). [CrossRef]
  13. P. E. Murphy, T. G. Brown, and D. T. Moore, "Interference imaging for aspheric surface testing," Appl. Opt. 39, 2122-2129 (2000). [CrossRef]
  14. K. R. Freischlad, "Absolute interferomtric testing based on reconstruction of rotational shear," Appl. Opt. 401637-1648 (2001). [CrossRef]
  15. S. Reichelt, C. Pruss, and H. J. Tiziani, "Absolute interferometric test of aspheres by use of twin computer-generated holograms," Appl. Opt. 42, 4468-4479 (2003). [CrossRef] [PubMed]
  16. Ulf Griesmann, "Three-flat test solutions based on simple mirror symmetry" Appl. Opt. 45, 5856-5865 (2006). [CrossRef] [PubMed]
  17. C. Evans, R. Hocken, and W. Estler, "Self-calibration: reversal, redundancy, error separation, and absolute testing," Annals of the CIRP 45, 617-634 (1996). [CrossRef]
  18. S. Kim, H. S. Yang, Y. W. Lee, and S. W. Kim, "Merit Function regression method for efficient alignment control of two-mirror optical system," Opt. Express (to be published). [PubMed]
  19. H. S. Yang, Y. W. Lee, J. B. Song, and I. W. Lee, "Null Hartmann test for fabrication of large aspheric surfaces," Opt. Express 6, 1839-1847 (2005). [CrossRef]

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