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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 20 — Oct. 2, 2006
  • pp: 9217–9222

Effect of femtosecond laser irradiation on structure of UV grade fused silica

W. Zhou, T.T. Tan, L.E.N. Lim, H.Y. Zheng, S. Zhu, and L.M. Wang  »View Author Affiliations


Optics Express, Vol. 14, Issue 20, pp. 9217-9222 (2006)
http://dx.doi.org/10.1364/OE.14.009217


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Abstract

A p-polarized femtosecond laser beam was used to irradiate a UV grade fused silica to create microchannels, which are useful for producing optical gratings or micro fluidics devices. The laser irradiated surface was characterized using optical microscope, stylus profiler, SEM, XRD and TEM. A special technique was used to protect the laser irradiated surfaces in preparing cross-sectional TEM samples. The XRD spectra and TEM observation reveal that structure of the fused silica remain amorphous after the femtosecond laser irradiation.

© 2006 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(160.4670) Materials : Optical materials
(350.3850) Other areas of optics : Materials processing

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: April 28, 2006
Revised Manuscript: September 18, 2006
Manuscript Accepted: September 21, 2006
Published: October 2, 2006

Virtual Issues
Vol. 1, Iss. 11 Virtual Journal for Biomedical Optics

Citation
W. Zhou, T. T. Tan, L. E. N. Lim, H. Y. Zheng, S. Zhu, and L. M. Wang, "Effect of femtosecond laser irradiation on structure of UV grade fused silica," Opt. Express 14, 9217-9222 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-20-9217


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References

  1. S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000). [CrossRef] [PubMed]
  2. M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000). [CrossRef]
  3. A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995). [CrossRef]
  4. H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005). [CrossRef]
  5. A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003). [CrossRef]
  6. J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004). [CrossRef]
  7. T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003). [CrossRef]
  8. G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005). [CrossRef]
  9. G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003). [CrossRef]
  10. Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999). [CrossRef]
  11. Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, and K. Hirao, "Three-Dimensional Microscopic Crystallization in Photosensitive Glass by Femtosecond Laser Pulses at Nonresonant Wavelength," Jpn. J. Appl. Phys. 37, 94- 96 (1998). [CrossRef]
  12. H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004). [CrossRef]
  13. A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001). [CrossRef]
  14. M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001). [CrossRef]
  15. V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004). [CrossRef]

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