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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 20 — Oct. 2, 2006
  • pp: 9261–9268

Quantification of thermal energy deposited in silicon by multiple femtosecond laser pulses

D. V. Tran, Y. C. Lam, B. S. Wong, H. Y. Zheng, and D. E. Hardt  »View Author Affiliations


Optics Express, Vol. 14, Issue 20, pp. 9261-9268 (2006)
http://dx.doi.org/10.1364/OE.14.009261


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Abstract

We report our study of deposited thermal energy in silicon induced by multiple-pulse femtosecond laser irradiation. Using infrared thermography, we quantified through in situ direct measurement of temperature fields that a significant portion of laser power (two-thirds or more) was deposited into the silicon substrate instead of being reflected or carried away with the ablated material. This is believed to be the first reported study of direct in situ measurement of temperature fields as the result of deposited thermal energy from multiple femtosecond laser pulses. Our simulation results support the measured data.

© 2006 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.6810) Lasers and laser optics : Thermal effects
(140.7090) Lasers and laser optics : Ultrafast lasers

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: June 30, 2006
Revised Manuscript: September 5, 2006
Manuscript Accepted: September 21, 2006
Published: October 2, 2006

Citation
D. V. Tran, Y. C. Lam, B. S. Wong, H. Y. Zheng, and D. E. Hardt, "Quantification of thermal energy deposited in silicon by multiple femtosecond laser pulses," Opt. Express 14, 9261-9268 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-20-9261


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References

  1. S. Preuss, A. Demchuk, and M. Stuke, "Sub-picosecond UV laser ablation of metals," Appl. Phys. A 61, 33-37 (1995). [CrossRef]
  2. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond, and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
  3. X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. QE-33, 1706-1716 (1997).
  4. A. Luft, U. Franz, A. Emsermannn, and J. Kaspar, "A study of thermal and mechanical effects on materials induced by pulsed laser drilling," Appl. Phys. A 63, 93-101 (1996). [CrossRef]
  5. Y. Hirayama and M. Obara, "Heat effects of metals ablated with femtosecond laser pulses," Appl. Surf. Sci. 197-198, 741-745 (2002). [CrossRef]
  6. R. Le Harzic, N. Huot, E. Audouard, C. Jonin, P. Laporte, S. Vallete, A. Fraczkiewicz, and R. Fortunier, "Comparison of heat-affected zones due to nanosecond and femtosecond laser pulses using transmission electronic microscopy," Appl. Phys. Lett. 80, 3886-3888 (2002). [CrossRef]
  7. A. Borowiec, M. Mackenzie, G. C. Weatherly, and H. K. Haugen, "Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon," Appl. Phys. A 76, 201-207 (2003). [CrossRef]
  8. J. Jia, M. Li, and C. V. Thompson, "Amorphization of silicon by femtosecond laser pulses," Appl. Phys. Lett. 84, 3205-3207 (2004). [CrossRef]
  9. A. Y. Vorobyev and C. Guo, "Direct observation of enhanced residual thermal energy coupling to solids in femtosecond laser ablation," Appl. Phys. Lett. 86, 01196 (2005). [CrossRef]
  10. A. Y. Vorobyev and C. Guo, "Enhanced absorptance of gold following multiple femtosecond laser ablation," Phys. Rev. B 72, 195422 (2005). [CrossRef]
  11. A. Yokotani, T. Mukumoto, Y. Kanamitsu, H. Fukumoto, and K. Kurosawa, "Time-resolving image analysis of drilling of thin silicon substrates with femtosecond laser ablation," Jpn. J. Appl. Phys. 44, 7998-8003 (2005). [CrossRef]
  12. S. Valette, R. Le Harzic, E. Audouard, N. Huot, R. Fillit, and R. Fortnuier, "X-ray analysis of mechanical and thermal effects induced by femtosecond laser treatment of aluminum single crystals," Appl. Surf. Sci. 252, 4691-4695 (2006). [CrossRef]
  13. A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, M. Schreiner, and D. von der Linde, "Femtosecond melting and ablation of semiconductors studied with time of flight mass spectroscopy," J. Appl. Phys. 85, 3301-3309 (1999). [CrossRef]
  14. P. P. Pronko, P. A. VanRompay, R. K. Singh, F. Qian, D. Du, and X. Liu, "Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses," Mat. Res. Soc. Symp. Proc. 397, 45-51 (1996). [CrossRef]
  15. D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, "Laser-solid interaction in the femtosecond time regime," Appl. Surf. Sci. 109-110, 1-10 (1997). [CrossRef]

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