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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 22 — Oct. 30, 2006
  • pp: 10228–10232

Polymeric waveguide Bragg grating filter using soft lithography

Askin Kocabas and Atilla Aydinli  »View Author Affiliations

Optics Express, Vol. 14, Issue 22, pp. 10228-10232 (2006)

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We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters.

© 2006 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(250.5460) Optoelectronics : Polymer waveguides

ToC Category:
Diffraction and Gratings

Original Manuscript: September 8, 2006
Revised Manuscript: October 16, 2006
Manuscript Accepted: October 17, 2006
Published: October 30, 2006

Askin Kocabas and Atilla Aydinli, "Polymeric waveguide Bragg grating filter using soft lithography," Opt. Express 14, 10228-10232 (2006)

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