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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 22 — Oct. 30, 2006
  • pp: 10460–10468

Laser micro-welding of transparent materials by a localized heat accumulation effect using a femtosecond fiber laser at 1558 nm

Takayuki Tamaki, Wataru Watanabe, and Kazuyoshi Itoh  »View Author Affiliations


Optics Express, Vol. 14, Issue 22, pp. 10460-10468 (2006)
http://dx.doi.org/10.1364/OE.14.010460


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Abstract

We report on laser micro-welding of materials based on a localized heat accumulation effect using an amplified femtosecond Er-fiber laser with a wavelength of 1558 nm and a repetition rate of 500 kHz. We demonstrated the welding of non-alkali alumino silicate glass substrates, resulting in a joint strength of 9.87 MPa. We also welded a non-alkali glass substrate and a silicon substrate using the 1558-nm laser pulses, resulting in a joint strength of 3.74 MPa. Our laser micro-welding technique can be extended to welding of semiconductor materials and has potential for various applications, such as three-dimensional stacks and assembly of electronic devices and microelectromechanical system devices.

© 2006 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

History
Original Manuscript: September 1, 2006
Revised Manuscript: October 4, 2006
Manuscript Accepted: October 6, 2006
Published: October 30, 2006

Virtual Issues
Vol. 1, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Takayuki Tamaki, Wataru Watanabe, and Kazuyoshi Itoh, "Laser micro-welding of transparent materials by a localized heat accumulation effect using a femtosecond fiber laser at 1558 nm," Opt. Express 14, 10460-10468 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-22-10460


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References

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