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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 22 — Oct. 30, 2006
  • pp: 10746–10752

Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique

Ngoc Diep Lai, Jian Hung Lin, Yi Ya Huang, and Chia Chen Hsu  »View Author Affiliations


Optics Express, Vol. 14, Issue 22, pp. 10746-10752 (2006)
http://dx.doi.org/10.1364/OE.14.010746


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Abstract

We demonstrate theoretically and experimentally a useful technique for fabrication of two- and three-dimensional (2D or 3D) quasi-periodic structures by a double-exposure of a periodic interference pattern. With three-beam and three-beam-plus-one interference techniques, one can fabricate a periodic 2D and 3D structure having six-fold symmetry, respectively. When this structure is duplicated in another orientation, its combination results in a quasi-periodic twelve-fold symmetry structure. Experimental results obtained by using two-exposure of three-beam and/or three-beam-plus-one interference pattern at 442 nm into a positive photoresist (AZ-4620) proved the theoretical predictions. This study is potentially useful for photonic researches and applications.

© 2006 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: August 9, 2006
Revised Manuscript: October 11, 2006
Manuscript Accepted: October 11, 2006
Published: October 30, 2006

Citation
Ngoc D. Lai, Jian H. Lin, Yi Y. Huang, and Chia C. Hsu, "Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique," Opt. Express 14, 10746-10752 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-22-10746


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