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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 24 — Nov. 27, 2006
  • pp: 11622–11630

High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay

Günther Roelkens, Dries Van Thourhout, and Roel Baets  »View Author Affiliations

Optics Express, Vol. 14, Issue 24, pp. 11622-11630 (2006)

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A high efficiency broadband grating coupler for Silicon-On-Insulator waveguides was designed. The grating coupler is defined by locally adding a poly-Silicon layer on top of the existing waveguide layer structure prior to grating etching. Adding this poly-Silicon layer reshapes the grating structure which changes its diffraction properties. Coupling efficiencies as high as 78% at a wavelength of 1.55µm are calculated and the optical 3dB bandwidth of the device is about 85nm. The device layout is compatible with standard CMOS technology processing.

© 2006 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Integrated Optics

Original Manuscript: September 27, 2006
Revised Manuscript: November 8, 2006
Manuscript Accepted: November 14, 2006
Published: November 27, 2006

Günther Roelkens, Dries Van Thourhout, and Roel Baets, "High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay," Opt. Express 14, 11622-11630 (2006)

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  1. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman and D. Van Thourhout, "Nanophotonic waveguides in Silicon-on-Insulator fabricated with CMOS technology," J. Lightwave Technol. 23, 401-412 (2005). [CrossRef]
  2. A. Sure, T. Dillon, J. Murakowski, C.C. Lin, D. Pustai and D.W. Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express 11, 3555-3561 (2003). [CrossRef] [PubMed]
  3. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada and H. Morita, "Low loss mode size converter from 0.3μm square Si waveguides to single mode fibers," Electron. Lett. 38, 1669-1670 (2002). [CrossRef]
  4. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single mode fibers," J. Quantum Electron. 38, 949-956 (2002). [CrossRef]
  5. D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue and R. Baets, "A compact two-dimensional grating coupler used as a polarization splitter," Photon. Technol. Lett. 15, 1249-1252 (2003). [CrossRef]
  6. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman and R. Baets, "Grating couplers for coupling between optical fibers and nanophotonic waveguides," Jap. J. Appl. Phys. 45, 6071-6077 (2006). [CrossRef]
  7. F. Van Laere, G. Roelkens, J. Schrauwen, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout and R. Baets, "Compact grating couplers between optical fibers and Silicon-on-Insulator photonic wire waveguides with 69% coupling efficiency," Conference on Optical Fiber Communication (Optical Society of America, Washington, D.C.) PDP15 (2006).
  8. D. Taillaert, P. Bienstman and R. Baets, "Compact efficient broadband grating coupler for Silicon-on-Insulator waveguides," Opt. Lett. 29, 2749-2752 (2004). [CrossRef] [PubMed]
  9. B. Wang, J. H. Jiang and G. P. Nordin, "Embedded slanted grating for vertical coupling between fibers and Silicon-on-Insulator planar waveguides," Photon. Technol. Lett. 17, 1884-1887 (2005). [CrossRef]
  10. P. Bienstman and R. Baets, "Rigorous and efficient optical VCSEL model based on vectorial eigenmode expansion and perfectly matched layers," IEE Proc.-J:Optoelectron.  149, 161-169 (2002). [CrossRef]

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