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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 24 — Nov. 27, 2006
  • pp: 11885–11891

Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Young-Sik Ghim and Seung-Woo Kim  »View Author Affiliations

Optics Express, Vol. 14, Issue 24, pp. 11885-11891 (2006)

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As an extension of the authors’ previous report of Ref 1, we describe an improved version of dispersive white-light interferometry that enables us to measure the tomographical thickness profile of a thin-film layer through Fourier-transform analysis of spectrally-resolved interference signals. The group refractive index can also be determined without prior knowledge of the geometrical thickness of the film layer. Owing to fast measurement speed with no need of mechanical depth scanning, the proposed method is well suited for in-line 3-D inspection of dielectric thinfilm layers particularly for the semiconductor and flat-panel display industry.

© 2006 Optical Society of America

OCIS Codes
(070.4790) Fourier optics and signal processing : Spectrum analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: September 27, 2006
Revised Manuscript: November 9, 2006
Manuscript Accepted: November 13, 2006
Published: November 27, 2006

Young-Sik Ghim and Seung-Woo Kim, "Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry," Opt. Express 14, 11885-11891 (2006)

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  1. Y.-S. Ghim and S.-W. Kim, "Dispersive white-light interferometry for thin-film thickness profile measurement," in Optical Measurement Systems for Industrial Inspection IV, W. Osten, C. Gorecki, and E. L. Novak, eds., in Proc. SPIE 5856, 419-426 (2005). [CrossRef]
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  8. S.-W. Kim and G.-H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973(1999). [CrossRef]
  9. D. Kim, S. Kim, H. J. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin-film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002). [CrossRef]
  10. U. Schnell, R. Dändliker and S. Gray, "Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target," Opt. Lett,  21, 528-530 (1996). [CrossRef] [PubMed]
  11. K.-N. Joo and S.-W. Kim, "Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser," Opt. Express 14, 5954-5960 (2006). [CrossRef] [PubMed]

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