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Spatial coherence measurements of a 13.2 nm transient nickel-like cadmium soft x-ray laser pumped at grazing incidence
Y. Liu, Y. Wang, M. A. Larotonda, B. M. Luther, J. J. Rocca, and D. T. Attwood »View Author Affiliations
Y. Liu,1
Y. Wang,2
M. A. Larotonda,2
B. M. Luther,2
J. J. Rocca,2
and D. T. Attwood1
1NSF ERC for Extreme Ultraviolet Science and Technology and College of Engineering, University of California at Berkeley, and Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720
2NSF ERC for Extreme Ultraviolet Science and Technology and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523
Optics Express, Vol. 14, Issue 26, pp. 12872-12879 (2006)
http://dx.doi.org/10.1364/OE.14.012872
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Abstract
The spatial coherence of a 13.2 nm transient collisional Ni-like Cd soft X-ray laser pumped at 23 degrees grazing incidence was measured in a series of Young’s double-slit experiments. We observed pronounced fringe visibility variations associated with microstructures in the beam’s intensity profile. The transverse coherence length was measured to be about 1/20 of the beam diameter and did not significantly improve with longer plasma columns. The equivalent incoherent source size is determined to be 10 µm and the laser’s peak spectral brightness ~3×1023 photons/sec/mm2/mrad2 within less than 0.01% spectral bandwidth.
© 2006 Optical Society of America
OCIS Codes
(030.1640) Coherence and statistical optics : Coherence
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(340.7440) X-ray optics : X-ray imaging
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: September 29, 2006
Manuscript Accepted: November 5, 2006
Published: December 22, 2006
Citation
Y. Liu, Y. Wang, M. A. Larotonda, B. M. Luther, J. J. Rocca, and D. T. Attwood, "Spatial coherence measurements of a 13.2 nm transient nickel-like cadmium soft x-ray laser pumped at grazing incidence," Opt. Express 14, 12872-12879 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-26-12872
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References
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Amendt, P.
Anderson, E. H.
Attwood, D. T.
Berrill, M.
Brewer, C.
Brizuela, F.
Cassou, K.
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Chang, Z.
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Christov, I. P.
Daido, H.
Denham, P.
Dunn, J.
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Gasparyan, P. D.
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Guilbaud, O.
Harteneck, B. D.
Hasegawa, N.
Hoef, B.
Jackson, K.
Jamelot, G.
Janulewicz, K. A.
Joyeux, D.
Kado, M.
Kapteyn, H. C.
Kato, Y.
Kawachi, T.
Kazamias, S.
Keenan, R.
Kishimoto, M.
Klisnick, A.
Kroemer, R.
Lagron, J.-C.
Larotonda, M. A.
Lechantre, Y.
Liddle, J. A.
Liu, Y.
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Lucianetti, A.
Luther, B. M.
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Rekawa, S. B.
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Rosen, M. D.
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- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
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- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature 435, 1210 (2005). [CrossRef] [PubMed]
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- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
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- Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, "Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm," Phys. Rev. A 72, 053807 (2005). [CrossRef]
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- B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, "Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum," Opt. Lett. 30, 165-167 (2005). [CrossRef] [PubMed]
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- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
- O. Guilbaud, A. Klisnick, K. Cassou, S. Kazamias, D. Ros, G. Jamelot, D. Joyeux, and D. Phalippou, "Origin of microstructures in picosecond X-ray laser beams," Europhys. Lett. 74, 823-829, (2006) [CrossRef]
- Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, "Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser," Phys. Rev. A 63, 033802 (2001).
- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature 435, 1210 (2005). [CrossRef] [PubMed]
- H. C. Kapteyn, M. M. Murnane and I. P. Christov, "Extreme Nonlinear Optics: Coherent X Rays from Lasers," Phys. Today, 58, 39-44 (2005). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V N. Shlyaptsev, "High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm," Phys. Rev. Lett. 94, 103901 (2005). [CrossRef] [PubMed]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
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- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni and J. J. Rocca, "High brightness injection seeded soft x-ray laser amplifier using a solid target," Phys. Rev. Lett. 97,123901 (2006). [CrossRef] [PubMed]
- O. Guilbaud, A. Klisnick, K. Cassou, S. Kazamias, D. Ros, G. Jamelot, D. Joyeux, and D. Phalippou, "Origin of microstructures in picosecond X-ray laser beams," Europhys. Lett. 74, 823-829, (2006) [CrossRef]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature 435, 1210 (2005). [CrossRef] [PubMed]
- M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, "Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence," Phys. Rev. A 68, 061802 (2003). [CrossRef]
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
- O. Guilbaud, A. Klisnick, K. Cassou, S. Kazamias, D. Ros, G. Jamelot, D. Joyeux, and D. Phalippou, "Origin of microstructures in picosecond X-ray laser beams," Europhys. Lett. 74, 823-829, (2006) [CrossRef]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
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- R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V N. Shlyaptsev, "High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm," Phys. Rev. Lett. 94, 103901 (2005). [CrossRef] [PubMed]
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- Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, "Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm," Phys. Rev. A 72, 053807 (2005). [CrossRef]
- R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V N. Shlyaptsev, "High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm," Phys. Rev. Lett. 94, 103901 (2005). [CrossRef] [PubMed]
- P. D. Gasparyan, F. A. Starikov and A. N. Starostin, "Angular divergence and spatial coherence of X-ray laser radiation," Phys. Usp. 41, 761-792 (1998). [CrossRef]
- P. D. Gasparyan, F. A. Starikov and A. N. Starostin, "Angular divergence and spatial coherence of X-ray laser radiation," Phys. Usp. 41, 761-792 (1998). [CrossRef]
- P. Amendt, M. Strauss, and R. A. London, "Plasma fluctuations and x-ray laser transverse coherence," Phys. Rev. A. 53, R23-R26 (1996). [CrossRef] [PubMed]
- R. A. London, M. Strauss and M. D. Rosen, "Modal analysis of x-ray laser coherence," Phys. Rev. Lett. 65, 563-566 (1990). [CrossRef] [PubMed]
- M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, "Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence," Phys. Rev. A 68, 061802 (2003). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
- M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, "Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence," Phys. Rev. A 68, 061802 (2003). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, "Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser," Phys. Rev. A 63, 033802 (2001).
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
- Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni and J. J. Rocca, "High brightness injection seeded soft x-ray laser amplifier using a solid target," Phys. Rev. Lett. 97,123901 (2006). [CrossRef] [PubMed]
- J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, "Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium", Opt. Lett. 30, 2581-2583 (2005). [CrossRef] [PubMed]
- B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, "Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum," Opt. Lett. 30, 165-167 (2005). [CrossRef] [PubMed]
- Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, "Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm," Phys. Rev. A 72, 053807 (2005). [CrossRef]
Europhys. Lett.
- O. Guilbaud, A. Klisnick, K. Cassou, S. Kazamias, D. Ros, G. Jamelot, D. Joyeux, and D. Phalippou, "Origin of microstructures in picosecond X-ray laser beams," Europhys. Lett. 74, 823-829, (2006) [CrossRef]
J. Quant. Spectrosc. Radiat. Transf.
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
J. Vac. Sci. Tech. B
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
Jpn. J. Appl. Phys.
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
Nature
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature 435, 1210 (2005). [CrossRef] [PubMed]
Opt. Lett.
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, "Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium", Opt. Lett. 30, 2581-2583 (2005). [CrossRef] [PubMed]
- A. Lucianetti, K. A. Janulewicz, R. Kroemer, G. Priebe, J. Tümmler, W. Sandner, P. V. Nickles, and V. I. Redkorechev, "Transverse spatial coherence of a transient nickel like silver soft-x-ray laser pumped by a single picosecond laser pulse," Opt. Lett. 29, 881-883 (2004). [CrossRef] [PubMed]
- B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, "Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum," Opt. Lett. 30, 165-167 (2005). [CrossRef] [PubMed]
- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
Phys. Fluids
- R. A. London, "Beam optics of exploding foil plasma x-ray lasers," Phys. Fluids 31, 184 (1988). [CrossRef]
Phys. Rev. A
- Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, "Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm," Phys. Rev. A 72, 053807 (2005). [CrossRef]
- Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, "Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser," Phys. Rev. A 63, 033802 (2001).
- M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, "Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence," Phys. Rev. A 68, 061802 (2003). [CrossRef]
Phys. Rev. A.
- P. Amendt, M. Strauss, and R. A. London, "Plasma fluctuations and x-ray laser transverse coherence," Phys. Rev. A. 53, R23-R26 (1996). [CrossRef] [PubMed]
Phys. Rev. Lett.
- Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni and J. J. Rocca, "High brightness injection seeded soft x-ray laser amplifier using a solid target," Phys. Rev. Lett. 97,123901 (2006). [CrossRef] [PubMed]
- R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V N. Shlyaptsev, "High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm," Phys. Rev. Lett. 94, 103901 (2005). [CrossRef] [PubMed]
- R. A. London, M. Strauss and M. D. Rosen, "Modal analysis of x-ray laser coherence," Phys. Rev. Lett. 65, 563-566 (1990). [CrossRef] [PubMed]
Phys. Today
- H. C. Kapteyn, M. M. Murnane and I. P. Christov, "Extreme Nonlinear Optics: Coherent X Rays from Lasers," Phys. Today, 58, 39-44 (2005). [CrossRef]
Phys. Usp.
- P. D. Gasparyan, F. A. Starikov and A. N. Starostin, "Angular divergence and spatial coherence of X-ray laser radiation," Phys. Usp. 41, 761-792 (1998). [CrossRef]
Proc. SPIE
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
Other
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- M. Born and E. Wolf, Principles of Optics, 7th Edition (Cambridge University Press,1999)
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2006, Vaschenko, Opt. Lett.
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,"Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- M. A. Larotonda, Y. Wang, M. Berrill, B. M. Luther, and J. J. Rocca, M. M. Shakya, S. Gilbertson, and Z. Chang, "Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers," Opt. Lett., (2006), In press [CrossRef] [PubMed]
- A. Klisnick, O. Guilbaud, D. Ros, K. Cassou, S. Kazamias, G. Jamelot, J.-C. Lagron, D. Joyeux, D. Phalippou, Y. Lechantre, M. Edwards, P. Mistry, and G. J. Tallents, "Experimental study of the temporal coherence and spectral profile of the 13.9nm transient X-ray laser," J. Quant. Spectrosc. Radiat. Transf. 99, 370-380 (2006) [CrossRef]
- O. Guilbaud, A. Klisnick, K. Cassou, S. Kazamias, D. Ros, G. Jamelot, D. Joyeux, and D. Phalippou, "Origin of microstructures in picosecond X-ray laser beams," Europhys. Lett. 74, 823-829, (2006) [CrossRef]
- Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni and J. J. Rocca, "High brightness injection seeded soft x-ray laser amplifier using a solid target," Phys. Rev. Lett. 97,123901 (2006). [CrossRef] [PubMed]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature 435, 1210 (2005). [CrossRef] [PubMed]
- R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V N. Shlyaptsev, "High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm," Phys. Rev. Lett. 94, 103901 (2005). [CrossRef] [PubMed]
- Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, "Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm," Phys. Rev. A 72, 053807 (2005). [CrossRef]
- H. C. Kapteyn, M. M. Murnane and I. P. Christov, "Extreme Nonlinear Optics: Coherent X Rays from Lasers," Phys. Today, 58, 39-44 (2005). [CrossRef]
- K. A. Goldberg, P. Naulleau, P. Denham, S. B. Rekawa, K. Jackson, E. H. Anderson and J. A. Liddle, "At-wavelength alignment and testing of the 0.3 NA MET optics," J. Vac. Sci. Tech. B 22, 2956-2961 (2004). [CrossRef]
- P. P. Naulleau, K. A. Goldberg, E. H. Anderson, P. Denham, B. Hoef, K. Jackson, A. Morlens, and S. Rekawa, "EUV microexposures at the ALS using the 0.3-NA MET projection optics," Microlithography 2005, paper [5751-04]. i.b.Proc. SPIE 5374, 881-891 (2004).
- H. Tang, H. Daido, M. Kishimoto, K. Sukegawa, R. Tai, S. Mosesson, M. Tanaka, P. Lu, T. Kawachi, K. Nagashima, K. Nagai, T. Norimatsu, K. Murai, H. Takenaka, Y. Kato, K. Mima, K. Nishihara, "Spatial coherence measurement of 13.9 nm Ni-like Ag soft x-ray laser pumped by a 1.5 ps, 20 J Laser," Jpn. J. Appl. Phys. 42, 443-448 (2003). [CrossRef]
- M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, "Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence," Phys. Rev. A 68, 061802 (2003). [CrossRef]
- Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, "Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser," Phys. Rev. A 63, 033802 (2001).
- P. D. Gasparyan, F. A. Starikov and A. N. Starostin, "Angular divergence and spatial coherence of X-ray laser radiation," Phys. Usp. 41, 761-792 (1998). [CrossRef]
- P. Amendt, M. Strauss, and R. A. London, "Plasma fluctuations and x-ray laser transverse coherence," Phys. Rev. A. 53, R23-R26 (1996). [CrossRef] [PubMed]
- R. A. London, M. Strauss and M. D. Rosen, "Modal analysis of x-ray laser coherence," Phys. Rev. Lett. 65, 563-566 (1990). [CrossRef] [PubMed]
- R. A. London, "Beam optics of exploding foil plasma x-ray lasers," Phys. Fluids 31, 184 (1988). [CrossRef]
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