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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 3 — Feb. 6, 2006
  • pp: 1021–1026

Spectral microthermography for component discrimination and hot spot identification in integrated circuits

Godofredo Bautista, Carlo Mar Blanca, Serafin Delica, Bernardino Buenaobra, and Caesar Saloma  »View Author Affiliations

Optics Express, Vol. 14, Issue 3, pp. 1021-1026 (2006)

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We demonstrate an efficient and versatile spectral microthermography technique for identifying hot and cold spots in the active layer of a biased integrated circuit. Hot (cold) spots are regions where heat accumulates more rapidly (slowly) than the average rate of the entire active layer. Knowledge of the hot and cold spot locations is crucial in assessing the thermal integrity of a layer structure because hot spots are locations were defects are more likely to develop. The active layer is uniformly illuminated with light from a tungsten lamp and its reflectance image r(x, y) is scanned across (x-direction) the entrance slit of a grating-prism pair (GRISM) spectrometer to produce a spectral map R(λ; x, y) where λ is the wavelength [450 ≤ λ(nm) ≤ 650]. For a particular slit position x = x1 , the GRISM spectrometer outputs a one-dimensional spectral map R(λ; x1, y). A pair of maps Rub(λ; x, y) and Rb(λ; x, y) are obtained from the active layer in the absence and presence of voltage bias, respectively. A reflectance gradient map ∆R(λ; x, y) = Rb(λ; x, y) - Rub(λ; x, y), is derived and used to locate possible hot and cold spots because ∆R(λ; x, y) is proportional to the temperature gradient ∆T(λ; x, y). We use the technique to generate gradient maps of a photodiode array and the emitting surface of a biased light emitting diode. Two different semiconductor materials could be distinguished easily from their dissimilar reflectance spectra.

© 2006 Optical Society of America

OCIS Codes
(110.6820) Imaging systems : Thermal imaging
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(180.0180) Microscopy : Microscopy

ToC Category:
Imaging Systems

Original Manuscript: October 24, 2005
Revised Manuscript: February 1, 2006
Manuscript Accepted: February 1, 2006
Published: February 6, 2006

Godofredo Bautista, Carlo Mar Blanca, Serafin Delica, Bernardino Buenaobra, and Caesar Saloma, "Spectral microthermography for component discrimination and hot spot identification in integrated circuits," Opt. Express 14, 1021-1026 (2006)

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