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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 4 — Feb. 20, 2006
  • pp: 1497–1504

Optical MEMS pressure sensor based on Fabry-Perot interferometry

Ming Li, Ming Wang, and Hongpu Li  »View Author Affiliations

Optics Express, Vol. 14, Issue 4, pp. 1497-1504 (2006)

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By employing the surface and bulk micro-electro-mechanical system (MEMS) techniques, we design and demonstrate a simple and miniature optical Fabry-Perot interferometric pressure sensor, where the loaded pressure is gauged by measuring the spectrum shift of the reflected optical signal. From the simulation results based on a multiple cavities interference model, we find that the response range and sensitivity of this pressure sensor can be simply altered by adjusting the size of sensing area. The experimental results show that high linear response in the range of 0.2–1.0 Mpa and a reasonable sensitivity of 10.07 nm/MPa (spectrum shift/pressure) have been obtained for this sensor.

© 2006 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(130.6010) Integrated optics : Sensors

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 4, 2006
Revised Manuscript: February 9, 2006
Manuscript Accepted: February 9, 2006
Published: February 20, 2006

Ming Li, Ming Wang, and Hongpu Li, "Optical MEMS pressure sensor based on Fabry-Perot interferometry," Opt. Express 14, 1497-1504 (2006)

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