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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 4 — Feb. 20, 2006
  • pp: 1505–1511

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling

Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, Gregory W. Auner, and John Mansfield  »View Author Affiliations


Optics Express, Vol. 14, Issue 4, pp. 1505-1511 (2006)
http://dx.doi.org/10.1364/OE.14.001505


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Abstract

Uniform period sub-micron gratings have been fabricated using focused ion beam milling on hafnium oxide waveguides. Atomic force microscopy indicates that the gratings have smooth and uniform profiles. At the period of 330 nm, the largest peak-to-peak height that was achieved was 85 nm. Scattering at the grating imperfections was found to be at least two orders of magnitude weaker than the intensity of the diffracted order.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

History
Original Manuscript: December 14, 2005
Revised Manuscript: January 17, 2006
Manuscript Accepted: February 3, 2006
Published: February 20, 2006

Citation
Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, Gregory Auner, and John Mansfield, "Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling," Opt. Express 14, 1505-1511 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-4-1505


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References

  1. T. Suhara and H. Nishihara, "Integrated optics components and devices using periodic structures," IEEE J. Quantum. Electron. 22, 845-867 (1986). [CrossRef]
  2. D. S. Goldman, P. L. White, and N. C. Anheier "Miniaturized spectrometer employing planar waveguides and grating couplers for chemical analysis," Appl. Opt. 29, 4583-4589 (1990). [CrossRef] [PubMed]
  3. K. Kintaka et al, "Integrated waveguide gratings for wavelength-demultiplexing of free space waves from guided waves," Opt. Express 12, 3072-3078 (2004). [CrossRef] [PubMed]
  4. S. Ura, T. Kimura, T. Suhara and H. Nishihara, "An integrated-optic device using electrooptic polymer waveguide on Si Substrate for modulating focus spot intensity distribution," IEEE Photonics Technol. Lett. 5, 1291-1293 (1993). [CrossRef]
  5. K. Chaganti, I. Avrutsky, and G. W. Auner, "Building a diffractive imaging micro spectrometer," presentation FWH36, Frontiers in Optics/Laser Science XX conference, Rochester, New York (Oct 10-14, 2004).
  6. J. Cheng and A. J. Steckl, "Focused ion beam fabricated microgratings for integrated optics applications," IEEE J. Sel. Top. Quantum. Electron. 8, 1323-1330 (2002). [CrossRef]
  7. V. G. Taeed, D. Moss, B. Eggleton, D. Freeman, S. Madden, M. Samoc, B. Luther-Davis, S. Janz, and D. Xu, "Higher order mode conversion via focused ion beam milled Bragg gratings in Silicon-on-Insulator waveguides," Opt. Express 12, 5274-5284 (2004). [CrossRef]
  8. R. H. Austin, J. O. Tegenfeldt, H. Cao, S. Y. Chou and E. C. Cox, "Scanning the controls: Genomics and Nanotechnology," IEEE Transactions on Nanotechnology 1, 12-18 (2002). [CrossRef]
  9. G. Xiong, D. A. Allwood, M. D. Cooke, and R. P. Cowburn, "Magnetic nanoelements for magnetoelectronics made by focused-ion-beam milling," Appl. Phys. Lett. 79, 3461-3463 (2001). [CrossRef]
  10. R. Waldhausel, B. Schnabel, P. Dannberg, E-B Kley, A. Brauer and W. Karthe, "Efficient coupling into polymer waveguides by gratings," Appl. Opt. 36, 9383-9390 (1997). [CrossRef]
  11. M. A. Bader, C. Kappel, A. Selle, J. Ihlemann, M. L. Ng and P. R. Herman, "Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures," Proc. SPIE 5578, 559-567 (2004). [CrossRef]
  12. A. Katzir, A. C. Livanos, J. B. Shellan and A. Yariv, "Chirped gratings in integrated optics," IEEE J. Quantum. Electron. 13, 296-304 (1977). [CrossRef]
  13. D.f Heitmann and C. Ortiz, "Calculation and experimental verification of two-dimensional focusing grating couplers," IEEE J. Quantum. Electron. 17, 1257-1263 (1981).
  14. I. Chyr and A. J. Steckl, "GaN focused ion beam micromachining with gas-assisted etching," J. Vac. Sci. Technol. B 19, 2547-2550 (2001). [CrossRef]
  15. K. Zinoviev, C. Dominguez and A. Vila, "Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam," Opt. Express 13, 8618-8624 (2005). [CrossRef] [PubMed]
  16. N. Yu and A. A. Polycarpou, "Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10nm nanoindentation measurements," J. Vac. Sci. Technol. B 22, 668-672 (2004). [CrossRef]
  17. M. J. Adams, An Introduction to Optical Waveguides (John Wiley and Sons, New York, 1981).
  18. A. V. Tishchenko, "Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method," Opt. Quantum Electron. 37, 309-330 (2005). [CrossRef]

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