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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 4 — Feb. 20, 2006
  • pp: 1505–1511

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling

Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, Gregory W. Auner, and John Mansfield  »View Author Affiliations

Optics Express, Vol. 14, Issue 4, pp. 1505-1511 (2006)

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Uniform period sub-micron gratings have been fabricated using focused ion beam milling on hafnium oxide waveguides. Atomic force microscopy indicates that the gratings have smooth and uniform profiles. At the period of 330 nm, the largest peak-to-peak height that was achieved was 85 nm. Scattering at the grating imperfections was found to be at least two orders of magnitude weaker than the intensity of the diffracted order.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: December 14, 2005
Revised Manuscript: January 17, 2006
Manuscript Accepted: February 3, 2006
Published: February 20, 2006

Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, Gregory Auner, and John Mansfield, "Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling," Opt. Express 14, 1505-1511 (2006)

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