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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 6 — Mar. 20, 2006
  • pp: 2473–2480

Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance

Byung Jin Chun, Chang Kwon Hwangbo, and Jong Sup Kim  »View Author Affiliations


Optics Express, Vol. 14, Issue 6, pp. 2473-2480 (2006)
http://dx.doi.org/10.1364/OE.14.002473


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Abstract

An optical monitoring method is described to compensate for the thickness error of nonquarterwave layers of dielectric multilayer filters, using optical admittance during deposition. Stability is confirmed by computer simulation of random thickness error generation in layers. In addition, a band split filter consisting of 61 nonquarterwave and nonperiodic layers is deposited using the proposed method, resulting in high spectral performance, as the application requires.

© 2006 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: November 30, 2005
Revised Manuscript: March 8, 2006
Manuscript Accepted: March 13, 2006
Published: March 20, 2006

Citation
Byung Chun, Chang Kwon Hwangbo, and Jong Sup Kim, "Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance," Opt. Express 14, 2473-2480 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-6-2473


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References

  1. H. A. Macleod, "Monitoring of optical coatings," Appl. Opt. 20, 82-88 (1981). [CrossRef] [PubMed]
  2. B. T. Sullivan and J. A. Dobrowolski, "Deposition error compensation for optical multilayer coatings. I. Theoretical description," Appl. Opt. 31, 3821-3835 (1992). [CrossRef] [PubMed]
  3. B. T. Sullivan and J. A. Dobrowolski, "Deposition error compensation for optical multilayer coatings. II. Experimental results-Sputtering system," Appl. Opt. 32, 2351-2360 (1993). [CrossRef] [PubMed]
  4. H. A. Macleod and E. Pelletier, "Error compensation mechanisms in some thin film monitoring systems," Opt. Acta 24, 907-930 (1977). [CrossRef]
  5. B. Vidal and E. Pelletier, "Nonquarterwave multilayer filters: optical monitoring with a minicomputer allowing correction of thickness errors," Appl. Opt. 18, 3857-3862 (1979). [PubMed]
  6. H. A. Macleod, "Turning value monitoring of narrow-band all-dielectric thin-film optical filters," Opt. Acta 19, 1-28 (1972). [CrossRef]
  7. F. Zhao, "Monitoring of periodic multilayer by the level method," Appl. Opt. 24, 3339-3343 (1985). [CrossRef] [PubMed]
  8. R. R. Willey, "Improved repeatability in the production of periodic thin film structures by the use of "Steering" with optical monitoring," Proc. Soc. Vac. Coaters 36, 156-159 (1993).
  9. C. Zhang, Y. Wang, and W. Lu, "Single-wavelength monitoring method for optical thin-film coating," Opt. Eng. 43, 1439-1444 (2004). [CrossRef]
  10. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (IoP, Bristol, UK, 2001). [CrossRef]

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