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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 6 — Mar. 20, 2006
  • pp: 2533–2538

Broad angular multilayer analyzer for soft X-rays

Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers  »View Author Affiliations

Optics Express, Vol. 14, Issue 6, pp. 2533-2538 (2006)

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Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45~49°, the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44~46° range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45~49° at 13 nm, where, the degree of polarization is more than 99.98%.

© 2006 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(260.5430) Physical optics : Polarization
(310.1860) Thin films : Deposition and fabrication
(340.6720) X-ray optics : Synchrotron radiation
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
X-ray Optics

Original Manuscript: November 10, 2005
Revised Manuscript: December 15, 2005
Manuscript Accepted: March 2, 2006
Published: March 20, 2006

Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, "Broad angular multilayer analyzer for soft X-rays," Opt. Express 14, 2533-2538 (2006)

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