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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 6 — Mar. 20, 2006
  • pp: 2533–2538

Broad angular multilayer analyzer for soft X-rays

Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers  »View Author Affiliations


Optics Express, Vol. 14, Issue 6, pp. 2533-2538 (2006)
http://dx.doi.org/10.1364/OE.14.002533


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Abstract

Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45~49°, the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44~46° range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45~49° at 13 nm, where, the degree of polarization is more than 99.98%.

© 2006 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(260.5430) Physical optics : Polarization
(310.1860) Thin films : Deposition and fabrication
(340.6720) X-ray optics : Synchrotron radiation
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
X-ray Optics

History
Original Manuscript: November 10, 2005
Revised Manuscript: December 15, 2005
Manuscript Accepted: March 2, 2006
Published: March 20, 2006

Citation
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, "Broad angular multilayer analyzer for soft X-rays," Opt. Express 14, 2533-2538 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-6-2533


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References

  1. J. Bahrdt, A. Gaupp, W. Gudat, M. Mast, K. Molter, W. B. Peatman, M. Scheer, Th. Schroeter, and Ch. Wang, "Circularly polarized synchrotron radiation from the crossed undulator at BESSY," Rev. Sci. Instrum. 63, 339-342 (1992). [CrossRef]
  2. J. B. Kortright, M. Rice, S. K. Kim, C. C. Walton, and T. Warwick, "Optics for element-resolved soft X-ray magneto-optical studies," J. Magn. Magn. Mater. 191, 79-89 (1999). [CrossRef]
  3. B. Kjornrattanawanich, S. Bajt, and J. F. Seely, "Mo/B4C/Si multilayer-coated photodiode with polarization sensitivity at an extreme-ultraviolet wavelength of 13.5 nm," Appl. Opt. 43, 1082-1090 (2004). [CrossRef] [PubMed]
  4. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pepin, and C. M. Falco, "Survey of Ti-, B- and Y-based soft x-ray-extreme-ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region," Appl. Opt. 35, 5134-5147 (1996). [CrossRef] [PubMed]
  5. B. L. Henke, E. M. Gullikson, and J. C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50-30000 eV, Z=1-92," At. Data Nucl. Data Tables 54, 181-342 (1993). [CrossRef]
  6. Z. Wang, J. Cao, A. G. Michette, "Depth-graded multilayer X-ray optics with broad angular response," Opt. Commun. 177, 25-32 (2000). [CrossRef]
  7. A. G. Michette and Z. Wang, "Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions," Opt. Commun. 177, 47-55 (2000). [CrossRef]
  8. I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, "Design of X-ray supermirrors," Nucl. Instrum. Methods Phys. Res. A 460, 424-443 (2001). [CrossRef]
  9. C. Morawe, E. Ziegler, J.-C. Peffen, and I. V. Kozhevnikov, "Design and fabrication of depth-graded X-ray multilayers," Nucl. Instrum. Methods Phys. Res. A 493, 189-198 (2002). [CrossRef]
  10. F. Schäfers, H.-C. Mertins, A. Gaupp, W. Gudat, M. Mertin, I. Packe, F. Schmolla, S. D. Fonzo, G. Soullié, W. Jark, R. Walker, X. L. Cann, R. Nyholm, and M. Eriksson, "Soft-x-ray polarimeter with multilayer optics: complete analysis of the polarization state of light," Appl. Opt. 38, 4074-4088 (1999). [CrossRef]
  11. E. Spiller, "Multilayer interference coatings for the vacuum ultraviolet," in Space Optics, B. J. Thompson and R. R. Shannon, eds. (National Academy of Science, Washington, D.C.,1974).

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