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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 10 — May. 14, 2007
  • pp: 5937–5947

Deposition of tungsten nanogratings induced by a single femtosecond laser beam

Haitao Zhang, Mingzhen Tang, Jerry McCoy, and Tsing-Hua Her  »View Author Affiliations


Optics Express, Vol. 15, Issue 10, pp. 5937-5947 (2007)
http://dx.doi.org/10.1364/OE.15.005937


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Abstract

Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.

© 2007 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.3900) Materials : Metals
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors
(350.2770) Other areas of optics : Gratings

ToC Category:
Laser Micromachining

History
Original Manuscript: March 19, 2007
Revised Manuscript: April 23, 2007
Manuscript Accepted: April 26, 2007
Published: April 30, 2007

Citation
Haitao Zhang, Mingzhen Tang, Jerry McCoy, and Tsing-Hua Her, "Deposition of tungsten nanogratings induced by a single femtosecond laser beam," Opt. Express 15, 5937-5947 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-10-5937


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