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Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids
J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau »View Author Affiliations
J. Chalupský,1,2,*
L. Juha,1
J. Kuba,2
J. Cihelka,1,3,4
V. Hájková,1
S. Koptyaev,1
J. Krása,1
A. Velyhan,1
M. Bergh,5
C. Caleman,5
J. Hajdu,5
R. M. Bionta,6
H. Chapman,6
S. P. Hau-Riege,6
R. A. London,6
M. Jurek,7
J. Krzywinski,7
R. Nietubyc,8
J. B. Pelka,7
R. Sobierajski,7
J. Meyer-ter-Vehn,9
A. Tronnier,9
K. Sokolowski-Tinten,10
N. Stojanovic,10
K. Tiedtke,11
S. Toleikis,11
T. Tschentscher,11
H. Wabnitz,11
and U. Zastrau12
1Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic
2Czech Technical University in Prague, Zikova 4, 166 36 Praha 1, Czech Republic
3J. Heyrovský Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, Dolejškova 3, 182 23 Prague 8, Czech Republic
4Charles University in Prague, Albertov 6, 128 43 Prague 2, Czech Republic
5Biomedical Centre, Uppsala University, Uppsala, SE-75124 Sweden
6Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
7Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland
8Soltan Institute for Nuclear Studies, PL-05-400 Swierk, Poland
9Max-Planck-Institut für Quantenoptik, Hans-Kopfermann-Str. 1, D-85748 Garching, Germany
10University of Duisburg-Essen, D-45117 Essen, Germany
11Deutsches Elektronen-Synchrotron DESY, Notkestrasse 85, D-22603 Hamburg, Germany
12University of Jena, D-07743 Jena, Germany
*chal@fzu.cz
Optics Express, Vol. 15, Issue 10, pp. 6036-6043 (2007)
http://dx.doi.org/10.1364/OE.15.006036
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Abstract
A linear accelerator based source of coherent radiation, FLASH (Free-electron LASer in Hamburg) provides ultra-intense femtosecond radiation pulses at wavelengths from the extreme ultraviolet (XUV; λ<100nm) to the soft X-ray (SXR; λ<30nm) spectral regions. 25-fs pulses of 32-nm FLASH radiation were used to determine the ablation parameters of PMMA - poly (methyl methacrylate). Under these irradiation conditions the attenuation length and ablation threshold were found to be (56.9±7.5) nm and ∼2 mJ∙cm-2, respectively. For a second wavelength of 21.7 nm, the PMMA ablation was utilized to image the transverse intensity distribution within the focused beam at μm resolution by a method developed here.
© 2007 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(340.0340) X-ray optics : X-ray optics
ToC Category:
X-ray Optics
History
Original Manuscript: February 20, 2007
Revised Manuscript: April 20, 2007
Manuscript Accepted: April 22, 2007
Published: May 2, 2007
Citation
J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036-6043 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-10-6036
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References
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Albert, F.
Andrejczuk, A.
Aug, F.
Ayvazyan, V.
Bakshaev, Yu. L.
Balcou, Ph.
Bartnik, A.
Bernardinello, A.
Bittner, M.
Bobashev, S. V.
Boody, F. P.
Carillon, A.
Cassou, K.
Cejnarová, A.
Chernenko, A. S.
Chvostová, D.
Dhez, P.
Domracheva, I. V.
Douillet, D.
Düsterer, S.
Feldhaus, J.
Fiedorowicz, H.
François, M.
Gottwald, A.
Grillon, G.
Grisham, M. E.
Guilbaud, O.
Hoehl, A.
Horvath, M.
Idir, M.
Ivanov, M. I.
Jaeglé, P.
Jahn, U.
Jamelot, G.
Jastrow, U.
Joyeux, D.
Juha, L.
Jungwirth, K.
Kazamias, S.
Kirm, M.
Klisnick, A.
Korolev, V. D.
Kozlová, M.
Krása, J.
Kravárik, J.
Kroth, U.
Krzywinski, J.
Kubat, P.
Kubát, P.
Kubeš, P.
Kuhlmann, M.
Le Pape, S.
Lefrou, Th.
Létal, V.
Liu, J. M.
Menoni, C. S.
Mercre, P.
Mikolajczyk, J.
Mocek, T.
Mullot, G.
Nantel, M.
Nietubyc, R.
Nunez, T.
Otcenasek, Z.
Pelka, J. B.
Pfeifer, M.
Phalippou, D.
Pientka, Z.
Pína, L.
Plé, F.
Plönjes, E.
Polan, J.
Präg, A.
Präg, A. R.
Präg, A. R.
Rakowski, R.
Richter, M.
Rocca, J. J.
Rohlena, K.
Ros, D.
Rus, B.
Ryc, L.
Schöppe, H.
Sebban, S.
Smirnov, D. N.
Sobierajski, R.
Sorokin, A. A.
Stupka, M.
Tiedtke, K.
Treusch, R.
Tumanov, V. I.
Ullschmied, J.
Ulm, G.
Valentin, C.
Vaschenko, G.
Vaschenko, G. O.
Wawro, A.
Zeitoun, P.
Zeitoun, Ph.
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- M. Kirm, A. Andrejczuk, J. Krzywinski, and R. Sobierajski, "Influence of excitation density on luminescence decay in Y3Al5O12:Ce and BaF2 crystals excited by free electron laser radiation in VUV," Phys. Stat. Sol. C2, 649 (2005).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
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- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
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- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- C. Valentin, D. Douillet, S. Kazamias, Th. Lefrou, G. Grillon, F. Aug, G. Mullot, Ph. Balcou, P. Mercre, and Ph. Zeitoun, "Imaging and quality assessment of high-harmonic focal spots," Opt. Lett. 28, 1049 (2003). [CrossRef] [PubMed]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- C. Valentin, D. Douillet, S. Kazamias, Th. Lefrou, G. Grillon, F. Aug, G. Mullot, Ph. Balcou, P. Mercre, and Ph. Zeitoun, "Imaging and quality assessment of high-harmonic focal spots," Opt. Lett. 28, 1049 (2003). [CrossRef] [PubMed]
- M. Kirm, A. Andrejczuk, J. Krzywinski, and R. Sobierajski, "Influence of excitation density on luminescence decay in Y3Al5O12:Ce and BaF2 crystals excited by free electron laser radiation in VUV," Phys. Stat. Sol. C2, 649 (2005).
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- M. Kirm, A. Andrejczuk, J. Krzywinski, and R. Sobierajski, "Influence of excitation density on luminescence decay in Y3Al5O12:Ce and BaF2 crystals excited by free electron laser radiation in VUV," Phys. Stat. Sol. C2, 649 (2005).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
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- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- M. Kirm, A. Andrejczuk, J. Krzywinski, and R. Sobierajski, "Influence of excitation density on luminescence decay in Y3Al5O12:Ce and BaF2 crystals excited by free electron laser radiation in VUV," Phys. Stat. Sol. C2, 649 (2005).
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
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- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
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- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
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Appl. Phys. Lett.
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
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Eur. J. Phys.
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J. Appl. Phys.
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
J. Microlith. Microfab. Microsyst.
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
Microelectron. Eng.
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Opt. Commun.
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Phys. Stat. Sol.
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Phys.Rev. Lett.
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Surf. Rev. Lett.
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Other
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2006, Mocek, Appl. Phys. Lett.
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- V. Ayvazyan, et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
- A. A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S. V. Bobashev, I. V. Domracheva, D. N. Smirnov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Jahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes, and R. Treusch, "Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams," Appl. Phys. Lett. 89, 221114 (2006). [CrossRef]
- S. Kazamias, K. Cassou, O. Guilbaud, A. Klisnick, D. Ros, F. Plé, G. Jamelot, B. Rus, M. Kozlová, M. Stupka, T. Mocek, D. Douillet, P. Zeitoun, D. Joyeux, and D. Phalippou, "Homogeneous focusing with a transient soft X-ray laser for irradiation experiments," Opt. Commun. 263, 98 (2006). [CrossRef]
- M. Kirm, A. Andrejczuk, J. Krzywinski, and R. Sobierajski, "Influence of excitation density on luminescence decay in Y3Al5O12:Ce and BaF2 crystals excited by free electron laser radiation in VUV," Phys. Stat. Sol. C2, 649 (2005).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krása, P. Kubát, J. Mikolajczyk, and R. Rakowski, "Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source," Microelectron. Eng. 73-74, 336-339 (2004). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Le Pape, Ph. Zeitoun, M. Idir, P. Dhez, J. J. Rocca, and M. François, "Electromagnetic-Field Distribution Measurements in the Soft X-Ray Range: Full Characterization of a Soft X-Ray Laser Beam," Phys.Rev. Lett. 88,183901 (2002) [CrossRef] [PubMed]
- P. Jaeglé, S. Sebban, A. Carillon, G. Jamelot, A. Klisnick, P. Zeitoun, B. Rus, M. Nantel, F. Albert, and D. Ros, "Ultraviolet luminescence of CsI and CsCl excited by soft x-ray laser," J. Appl. Phys. 81, 2406 (1997). [CrossRef]
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