Micro knife-edge optical measurement device in a silicon-on-insulator substrate

doi:10.1364/OE.15.006367

Micro knife-edge optical measurement device in a silicon-on-insulator substrate

Yi Chiu and Jiun-Hung Pan »View Author Affiliations

Optics Express, Vol. 15, Issue 10, pp. 6367-6373 (2007)
http://dx.doi.org/10.1364/OE.15.006367

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Abstract
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Abstract

The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused spots. In this paper, we present a micro knife-edge scanner fabricated in a silicon-on-insulator substrate using the micro-electromechanical-system technology. A photo detector can be fabricated in the device to allow further integration with on-chip signal conditioning circuitry. A novel backside deep reactive ion etching process is proposed to solve the residual stress effect due to the buried oxide layer. Focused optical spot profile measurement is demonstrated.

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 26, 2007
Revised Manuscript: May 7, 2007
Manuscript Accepted: May 7, 2007
Published: May 8, 2007

Citation
Yi Chiu and Jiun-Hung Pan, "Micro knife-edge optical measurement device in a silicon-on-insulator substrate," Opt. Express 15, 6367-6373 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-10-6367

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References

J. M. Khosrofian and B. A. Garetz, "Measurement of a Gaussian laser beam diameter through the direct inversion of knife-edge data," Appl. Opt. 22, 3406-3410 (1983). [CrossRef] [PubMed]
A. H. Firester, M. E. Heller, and P. Sheng, "Knife-edge scanning measurements of subwavelength focused light beams," Appl. Opt. 16, 1971-1974 (1976). [CrossRef]
F. Zamkotsian and K. Dohlen, "Surface characterization of micro-optical components by Foucault’s knife-edge method: the case of a micromirror array," Appl. Opt. 38, 6532-6539 (1999). [CrossRef]
D. Karabacak, T. Kouha, C. C. Huang, and K. L. Ekinci, "Optical knife-edge technique for nanomechanical displacement detection," Appl. Phys. Lett. 88, 193122, 1-3 (2006). [CrossRef]
J. Murakowski, M. Cywiak, B. Rosner, and D. van der Weide, "Far field optical imaging with subwavelength resolution," Opt. Commun. 185, 295-303 (2000). [CrossRef]
M. Cywiak, M. Servýn, and F. M. Santoyo, "Vibrating knife-edge technique for measuring the focal length of a microlens," Appl. Opt. 40, 4947-4952 (2001). [CrossRef]
S. Sumriddetchkajorn and N. A. Riza, "Micro-electro-mechanical system-based digitally controlled optical beam profiler," Appl. Opt. 41, 3506-3510 (2002). [CrossRef] [PubMed]

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