OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 10 — May. 14, 2007
  • pp: 6367–6373

Micro knife-edge optical measurement device in a silicon-on-insulator substrate

Yi Chiu and Jiun-Hung Pan  »View Author Affiliations

Optics Express, Vol. 15, Issue 10, pp. 6367-6373 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (627 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused spots. In this paper, we present a micro knife-edge scanner fabricated in a silicon-on-insulator substrate using the micro-electromechanical-system technology. A photo detector can be fabricated in the device to allow further integration with on-chip signal conditioning circuitry. A novel backside deep reactive ion etching process is proposed to solve the residual stress effect due to the buried oxide layer. Focused optical spot profile measurement is demonstrated.

© 2007 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 26, 2007
Revised Manuscript: May 7, 2007
Manuscript Accepted: May 7, 2007
Published: May 8, 2007

Yi Chiu and Jiun-Hung Pan, "Micro knife-edge optical measurement device in a silicon-on-insulator substrate," Opt. Express 15, 6367-6373 (2007)

Sort:  Author  |  Year  |  Journal  |  Reset  


Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited