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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 11 — May. 28, 2007
  • pp: 6809–6816

Iterative algorithm for three flat test

Maurizio Vannoni and Giuseppe Molesini  »View Author Affiliations


Optics Express, Vol. 15, Issue 11, pp. 6809-6816 (2007)
http://dx.doi.org/10.1364/OE.15.006809


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Abstract

Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated.

© 2007 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: November 16, 2006
Revised Manuscript: March 19, 2007
Manuscript Accepted: March 20, 2007
Published: May 18, 2007

Citation
Maurizio Vannoni and Giuseppe Molesini, "Iterative algorithm for three flat test," Opt. Express 15, 6809-6816 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-11-6809


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