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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 11 — May. 28, 2007
  • pp: 6900–6907

Fabrication and characterization of microlens arrays using a cantilever-based spotter

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, F. Carcenac, H. Ottevaere, and H. Thienpont  »View Author Affiliations


Optics Express, Vol. 15, Issue 11, pp. 6900-6907 (2007)
http://dx.doi.org/10.1364/OE.15.006900


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Abstract

We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25–130μm] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55–181μm] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than λ/14.

© 2007 Optical Society of America

OCIS Codes
(160.5470) Materials : Polymers
(220.3630) Optical design and fabrication : Lenses
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: February 9, 2007
Revised Manuscript: March 20, 2007
Manuscript Accepted: March 21, 2007
Published: May 21, 2007

Citation
V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, F. Carcenac, H. Ottevaere, and H. Thienpont, "Fabrication and characterization of microlens arrays using a cantilever-based spotter," Opt. Express 15, 6900-6907 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-11-6900


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References

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