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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 15 — Jul. 23, 2007
  • pp: 9222–9231

An alternative scattering method to characterize surface roughness from transparent substrates

M. Zerrad, C. Deumié, M. Lequime, and C. Amra  »View Author Affiliations

Optics Express, Vol. 15, Issue 15, pp. 9222-9231 (2007)

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An alternative scattering method is developed to characterize surface roughness from the two faces of transparent substrates. Specific weights are attributed to each surface in the scattering process, due to the large substrate thickness. The resulting roughness spectra are shown to quasi-overlap those of near field microscopy.

© 2007 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 26, 2006
Revised Manuscript: August 30, 2006
Manuscript Accepted: September 2, 2006
Published: July 12, 2007

M. Zerrad, C. Deumié, M. Lequime, and C. Amra, "An alternative scattering method to characterize surface roughness from transparent substrates," Opt. Express 15, 9222-9231 (2007)

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