OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 15 — Jul. 23, 2007
  • pp: 9625–9630

Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Stijn Scheerlinck, Jonathan Schrauwen, Frederik Van Laere, Dirk Taillaert, Dries Van Thourhout, and Roel Baets  »View Author Affiliations

Optics Express, Vol. 15, Issue 15, pp. 9625-9630 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (1085 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Compact metal grating couplers for efficient and broadband coupling between optical fibers and silicon-on-insulator waveguides are proposed and demonstrated. Simulation results for silver, gold, aluminum and copper grating couplers are presented. Using a uniform silver grating, coupling efficiencies are calculated as high as 60 % at a wavelength of 1.55 µm. Metal grating couplers require only one single etching or lift-off step and are therefore very easy to fabricate. As a proof of principle, a gold grating coupler for near-vertical fiber-to-waveguide coupling was fabricated using e-beam writing and lift-off, demonstrating 34 % coupling efficiency and a 1 dB-bandwidth of 40 nm. Measurement data and simulation results are in good agreement.

© 2007 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Diffraction and Gratings

Original Manuscript: May 1, 2007
Revised Manuscript: June 28, 2007
Manuscript Accepted: July 8, 2007
Published: July 18, 2007

Stijn Scheerlinck, Jonathan Schrauwen, Frederik Van Laere, Dirk Taillaert, Dries Van Thourhout, and Roel Baets, "Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides," Opt. Express 15, 9625-9630 (2007)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightwave Technol. 23, 401-412 (2005). [CrossRef]
  2. D. Taillaert, P. Bienstman, and R. Baets, "Compact efficient broadband grating coupler for silicon-on-insulator waveguides," Opt. Lett. 29, 2749--2751 (2004). [CrossRef] [PubMed]
  3. D. Taillaert, R. Baets, P. Dumon, W. Bogaerts, D. Van Thourhout, B. Luyssaert, V. Wiaux, S. Beckx, J. Wouters, "Silicon-on-Insulator platform for integrated wavelength-selective Components," Proc. of IEEE/LEOS Workshop on Fibers and Optical Passive Components, 115--120 (2005). [CrossRef]
  4. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, "Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides," J. Lightwave Technol. 25, 151--156 (2007). [CrossRef]
  5. G. Roelkens, D. Van Thourhout, and R. Baets, "High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay," Opt. Express,  14, 11622--11630 (2006). [CrossRef] [PubMed]
  6. P. Bienstman and R. Baets, "Optical modeling of photonic crystals and VCSEL's using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 33, 349-354 (2001). [CrossRef]
  7. P. B. Johnson and R. W. Christy, "Optical Constants of the Noble Metals," Phys. Rev. B 6,4370-4379 (1972). [CrossRef]
  8. E. D. Palik, "Handbook of Optical Constants of Solids," Academic Press Inc. (1985), ISBN 0-12-544420-6.
  9. R. Emmons and D. Hall, "Buried-oxide silicon-on-insulator structures II: Waveguide grating couplers," IEEE J. Quantum Electron. 28, 164-175 (1992). [CrossRef]
  10. T. Suhara and H. Nishihara, "Integrated optics components and devices using periodic structures," IEEE J. Quantum Electron. 22, 845-867 (2002). [CrossRef]
  11. K. A. Bates, L. Li, R. Roncone, and J. Burke, "Gaussian beams from variable groove depth grating couplers in planar waveguides," Appl. Opt. 32, 2112-2116 (1993). [CrossRef] [PubMed]
  12. R. Waldhausl, B. Schnabel, P. Dannberg, E. Kley, A. Brauer, W. Karthe, "Efficient coupling into polymer waveguides by gratings," Appl. Opt. 36, 9383-9390 (1997). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited