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Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning
P. W. Wachulak, M. C. Marconi, R. A. Bartels, C. S. Menoni, and J. J. Rocca »View Author Affiliations
NSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State University, USA
Optics Express, Vol. 15, Issue 17, pp. 10622-10628 (2007)
http://dx.doi.org/10.1364/OE.15.010622
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Abstract
Three dimensional images were obtained using a single high numerical aperture hologram recorded in a high resolution photoresist with a table top λ=46.9 nm laser. Gabor holograms were numerically reconstructed over a range of image planes by sweeping the propagation distance in the numerical reconstruction algorithm, allowing numerical optical sectioning. A robust three dimension image of a test object was obtained with numerical optical sectioning, providing a longitudinal resolution of approximately 2 µm and a lateral resolution of 164 nm.
© 2007 Optical Society of America
OCIS Codes
(090.0090) Holography : Holography
(100.2960) Image processing : Image analysis
ToC Category:
Holography
History
Original Manuscript: June 11, 2007
Revised Manuscript: July 27, 2007
Manuscript Accepted: July 31, 2007
Published: August 7, 2007
Citation
P. W. Wachulak, M. C. Marconi, R. A. Bartels, C. S. Menoni, and J. J. Rocca, "Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning," Opt. Express 15, 10622-10628 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-17-10622
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References
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- R. I. Tobey, M. E. Siemens, O. Cohen, M. M. Murnane, H. C. Kapteyn and K. A. Nelson, "Ultrafast extreme ultraviolet holography: dynamic monitoring of surface deformation," Opt. Lett. 32, 286-288 (2007). [CrossRef] [PubMed]
- R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. W. Liu, D. Attwood, and C. Jacobsen. "Generation of spatially coherent light at extreme ultraviolet wavelengths," Science 297, 376-378 (2002). [PubMed]
- I. McNulty, J. Kirz, C. Jacobsen, E. Anderson, M. R. Howells, and D. P. Kern, "High resolution imaging by Fourier Transform X-ray holography," Science 256, 1009-1012 (1992). [CrossRef] [PubMed]
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- C. Jacobsen, M. Howells, J. Kirz, and S. Rothman, "X-ray holographic microscopy using photoresist," J. Opt. Soc. Am. A 7, 1847-1861 (1990). [CrossRef]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. W. Liu, D. Attwood, and C. Jacobsen. "Generation of spatially coherent light at extreme ultraviolet wavelengths," Science 297, 376-378 (2002). [PubMed]
- S. Eisebitt, J. Lüning, W. F. Schlotter, M. Lörgen, O. Hellwing, W. Eberhardt, and J. Stöhr, "Lensless imaging of magnetic nanostructures by X-ray spectro-holography," Nature 432, 885-888 (2004). [CrossRef] [PubMed]
- S. Eisebitt, J. Lüning, W. F. Schlotter, M. Lörgen, O. Hellwing, W. Eberhardt, and J. Stöhr, "Lensless imaging of magnetic nanostructures by X-ray spectro-holography," Nature 432, 885-888 (2004). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- C. D. Macchietto, B. R. Benware, and J. J. Rocca, "Generation of millijoule-level soft-X ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier," Opt. Lett. 24, 1115-1117 (1999). [CrossRef]
- B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, "Demonstration of a high average power tabletop soft X-ray laser," Phys. Rev. Lett. 81, 5804-5807 (1998). [CrossRef]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- P. W. Wachulak, R. A. Bartels, M. C. Marconi, C. S. Menoni, and J. J. Rocca. "Sub-400 nm spatial resolution extreme ultraviolet holography with table top laser," Opt. Express 14, 9636-9642 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, "Demonstration of X-Ray holography with an X-Ray laser," Science 238, 517-519 (1987). [CrossRef] [PubMed]
- I. McNulty, "The future of X-ray holography," Nucl. Instrum. Methods Phys. Res. A 347, 170-176 (1994). [CrossRef]
- I. McNulty, J. Kirz, C. Jacobsen, E. Anderson, M. R. Howells, and D. P. Kern, "High resolution imaging by Fourier Transform X-ray holography," Science 256, 1009-1012 (1992). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- P. W. Wachulak, R. A. Bartels, M. C. Marconi, C. S. Menoni, and J. J. Rocca. "Sub-400 nm spatial resolution extreme ultraviolet holography with table top laser," Opt. Express 14, 9636-9642 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, "Demonstration of a high average power tabletop soft X-ray laser," Phys. Rev. Lett. 81, 5804-5807 (1998). [CrossRef]
- R. I. Tobey, M. E. Siemens, O. Cohen, M. M. Murnane, H. C. Kapteyn and K. A. Nelson, "Ultrafast extreme ultraviolet holography: dynamic monitoring of surface deformation," Opt. Lett. 32, 286-288 (2007). [CrossRef] [PubMed]
- R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. W. Liu, D. Attwood, and C. Jacobsen. "Generation of spatially coherent light at extreme ultraviolet wavelengths," Science 297, 376-378 (2002). [PubMed]
- J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, "Demonstration of X-Ray holography with an X-Ray laser," Science 238, 517-519 (1987). [CrossRef] [PubMed]
- R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. W. Liu, D. Attwood, and C. Jacobsen. "Generation of spatially coherent light at extreme ultraviolet wavelengths," Science 297, 376-378 (2002). [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- P. W. Wachulak, R. A. Bartels, M. C. Marconi, C. S. Menoni, and J. J. Rocca. "Sub-400 nm spatial resolution extreme ultraviolet holography with table top laser," Opt. Express 14, 9636-9642 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- J. J. Rocca, "Table-top soft x-ray lasers," Rev. Sci. Instrum. 70, 3799-3827 (1999). [CrossRef]
- C. D. Macchietto, B. R. Benware, and J. J. Rocca, "Generation of millijoule-level soft-X ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier," Opt. Lett. 24, 1115-1117 (1999). [CrossRef]
- B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, "Demonstration of a high average power tabletop soft X-ray laser," Phys. Rev. Lett. 81, 5804-5807 (1998). [CrossRef]
- J. J. Rocca, D. P. Clark, J. L. A. Chilla, and V. N. Shlyaptsev, "Energy extraction and achievement of the saturation limit in a discharge-pumped table-top soft x-ray amplifier," Phys. Rev. Lett. 77, 1476-1479 (1996). [CrossRef] [PubMed]
- G. L. Rogers. "Gabor diffraction microscopy. The hologram as a generalized zone-plate," Nature 166, 236-237 (1950). [CrossRef]
- S. Eisebitt, J. Lüning, W. F. Schlotter, M. Lörgen, O. Hellwing, W. Eberhardt, and J. Stöhr, "Lensless imaging of magnetic nanostructures by X-ray spectro-holography," Nature 432, 885-888 (2004). [CrossRef] [PubMed]
- U. Schnars and P. O. Jüptner, "Digital recording and numerical reconstruction of holograms," Meas. Sci. Technol. 13, R85-R101 (2002). [CrossRef]
- U. Schnars and P. O. Jüptner, "Digital recording and reconstruction of holograms in hologram interferometry and shearography," Appl. Opt. 33, 4373-4377 (1994). [CrossRef] [PubMed]
- J. J. Rocca, D. P. Clark, J. L. A. Chilla, and V. N. Shlyaptsev, "Energy extraction and achievement of the saturation limit in a discharge-pumped table-top soft x-ray amplifier," Phys. Rev. Lett. 77, 1476-1479 (1996). [CrossRef] [PubMed]
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- J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, "Demonstration of X-Ray holography with an X-Ray laser," Science 238, 517-519 (1987). [CrossRef] [PubMed]
- J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, "Demonstration of X-Ray holography with an X-Ray laser," Science 238, 517-519 (1987). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- F. Brizuela, G. Vaschenko, C, Brewer, M. Grisham, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artiukov, Y. P. Pershing and V. V. Kondratenko, "Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser," Opt. Express 13, 3983-3988 (2005). [CrossRef] [PubMed]
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Appl. Opt.
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J. Opt. Soc. Am. A
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Nature
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Nucl. Instrum. Methods Phys. Res. A
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Opt. Express
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Opt. Lett.
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, D. T. Attwood. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
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Phys. Rev. Lett.
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Science
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Other
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- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn and V. V. Kondratenko. "Nano-imaging with a compact extreme ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005). [CrossRef] [PubMed]
- F. Brizuela, G. Vaschenko, C, Brewer, M. Grisham, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artiukov, Y. P. Pershing and V. V. Kondratenko, "Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser," Opt. Express 13, 3983-3988 (2005). [CrossRef] [PubMed]
- S. Eisebitt, J. Lüning, W. F. Schlotter, M. Lörgen, O. Hellwing, W. Eberhardt, and J. Stöhr, "Lensless imaging of magnetic nanostructures by X-ray spectro-holography," Nature 432, 885-888 (2004). [CrossRef] [PubMed]
- R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. W. Liu, D. Attwood, and C. Jacobsen. "Generation of spatially coherent light at extreme ultraviolet wavelengths," Science 297, 376-378 (2002). [PubMed]
- U. Schnars and P. O. Jüptner, "Digital recording and numerical reconstruction of holograms," Meas. Sci. Technol. 13, R85-R101 (2002). [CrossRef]
- J. J. Rocca, "Table-top soft x-ray lasers," Rev. Sci. Instrum. 70, 3799-3827 (1999). [CrossRef]
- B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, "Demonstration of a high average power tabletop soft X-ray laser," Phys. Rev. Lett. 81, 5804-5807 (1998). [CrossRef]
- J. J. Rocca, D. P. Clark, J. L. A. Chilla, and V. N. Shlyaptsev, "Energy extraction and achievement of the saturation limit in a discharge-pumped table-top soft x-ray amplifier," Phys. Rev. Lett. 77, 1476-1479 (1996). [CrossRef] [PubMed]
- I. McNulty, "The future of X-ray holography," Nucl. Instrum. Methods Phys. Res. A 347, 170-176 (1994). [CrossRef]
- I. McNulty, J. Kirz, C. Jacobsen, E. Anderson, M. R. Howells, and D. P. Kern, "High resolution imaging by Fourier Transform X-ray holography," Science 256, 1009-1012 (1992). [CrossRef] [PubMed]
- J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, "Demonstration of X-Ray holography with an X-Ray laser," Science 238, 517-519 (1987). [CrossRef] [PubMed]
- G. L. Rogers. "Gabor diffraction microscopy. The hologram as a generalized zone-plate," Nature 166, 236-237 (1950). [CrossRef]
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