OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 17 — Aug. 20, 2007
  • pp: 10744–10752

Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness

Anni Lehmuskero, Markku Kuittinen, and Pasi Vahimaa  »View Author Affiliations

Optics Express, Vol. 15, Issue 17, pp. 10744-10752 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (7231 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We show that the optical properties of thin metallic films depend on the thickness of the film as well as on the deposition technique. Several thicknesses of electron-beam-gun-evaporated aluminium films were measured and the refractive index and the extinction coefficient defined using ellipsometry. In addition, the refractive indexes and the extinction coefficients of atomic-layer-deposited iridium were compared with those of evaporated iridium samples.

© 2007 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: March 21, 2007
Revised Manuscript: June 18, 2007
Manuscript Accepted: June 28, 2007
Published: August 10, 2007

Anni Lehmuskero, Markku Kuittinen, and Pasi Vahimaa, "Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness," Opt. Express 15, 10744-10752 (2007)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. Kuwata-Gonokami, N. Saito, Y. Ino, M. Kauranen, K. Jefimovs, T. Vallius, J. Turunen, and Y. Svirko, "Giant optical activity in quasi-two-dimensional planar nanostructures," Phys. Rev. Lett. 95, 227401 (2005). [CrossRef] [PubMed]
  2. K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, "Inductive grid filters for rejection of infrared radiation," J. Mod. Opt. 51, 1651-1661 (2004).
  3. R. S. Bennink, Young-Kwon Yoon, R. W. Boyd, and J. E. Sipe, "Accessing the optical nonlinearity of metals with metaldielectric photonic bandgap structures," Opt. Lett. 24, 1416-1418 (1999). [CrossRef]
  4. B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, "A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures," J. Opt. A: Pure Appl. Opt. 24, 1416-1418 (1999).
  5. E. Palik, ed., Handbook of Optical Constants of Solids I (Academic Press, San Diego, 1985).
  6. Handbook of Chemistry and Physics (CRC Press, Boca Raton, 1984).
  7. J. A. Woollam Co., Inc., http://www.jawoollam.com/index.html>
  8. LEO 1550 Scanning electron microscope is manufactured by Nano Technology Systems Division of Carl Zeiss SMT, formerly known as LEO Elektronenmikroskopie GmbH, http://www.zeiss.com/>
  9. J. A. Woollam Co., Inc., http://www.jawoollam.com/wvase32.html>
  10. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge Univ. Press, Cambridge, 1992).
  11. J. H. Weaver, C. G. Olson, and D. W. Lynch, "Optical investigation of the electronic structure of bulk Rh and Ir," Phys. Rev. B. 15, 4115-4118 (1977).
  12. C. V. Thompson, "Structure evolution during processing of polycrystalline films," Annu. Rev. Mater. Sci. 30, 159-190 (2000). [CrossRef]
  13. E. Lee, N. Truong, B. Prater, and J. Kardokus, "Copper alloys and alternative barriers for sub-45 nm nodes," Semiconductor International, (7/1/2006).
  14. K. L. Chopra, Thin Film Phenomena (Robert E. Krieger Publishing Company, New York, 1979).
  15. G. Hass, W. R. Hunter, and R. Tousey, "Reflectance of evaporated aluminium in the vacuum ultraviolet," J. Opt. Soc. Am. 46, 1009-1012 (1956). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited