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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 18 — Sep. 3, 2007
  • pp: 11154–11166

Magnetically actuated MEMS microlens scanner for in vivo medical imaging†

Chin-Pang-Billy Siu, Haishan Zeng, and Mu Chiao  »View Author Affiliations

Optics Express, Vol. 15, Issue 18, pp. 11154-11166 (2007)

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A magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane (PDMS) microlens is demonstrated. The device is driven by an external AC magnetic field, eliminating chip circuitry and thermal deformation from joule heating. The resonant frequency of 215.2 Hz and scanning angle of 23° of the scanner have been demonstrated. Experimental studies and optical modeling have shown that this microlens scanner achieves a scanning range of 125 µm when actuated by an external magnetic field of 22.2×10-3 Tesla flux density. The device has potential applications in in vivo medical imaging for minimally invasive diagnoses.

© 2007 Optical Society of America

OCIS Codes
(120.3890) Instrumentation, measurement, and metrology : Medical optics instrumentation
(120.5800) Instrumentation, measurement, and metrology : Scanners
(220.3630) Optical design and fabrication : Lenses
(230.3810) Optical devices : Magneto-optic systems
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 14, 2007
Revised Manuscript: August 7, 2007
Manuscript Accepted: August 8, 2007
Published: August 21, 2007

Virtual Issues
Vol. 2, Iss. 10 Virtual Journal for Biomedical Optics

Chin Pang Billy Siu, Haishan Zeng, and Mu Chiao, "Magnetically actuated MEMS microlens scanner for in vivo medical imaging," Opt. Express 15, 11154-11166 (2007)

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