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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 18 — Sep. 3, 2007
  • pp: 11370–11384

Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry

Hanne Martinussen, Astrid Aksnes, and Helge E. Engan  »View Author Affiliations

Optics Express, Vol. 15, Issue 18, pp. 11370-11384 (2007)

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A heterodyne interferometer has been built in order to characterize vibrations on micro- and nanostructures. The interferometer offers the possibility of both absolute phase and high resolution absolute amplitude vibrational measurements. By using two acousto-optic modulators (AOMs) in one of the interferometer arms and varying the frequency inputs of both, the setup is designed to measure vibrations in the entire frequency range 0 - 1.2GHz. The system is here demonstrated on Capacitor Micromachined Ultrasonic Transducers (CMUTs) and a PZT transducer to show measurements from 5kHz up to 35MHz. We have measured absolute amplitudes with picometer resolution.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 6, 2007
Revised Manuscript: August 19, 2007
Manuscript Accepted: August 19, 2007
Published: August 23, 2007

Hanne Martinussen, Astrid Aksnes, and Helge E. Engan, "Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry," Opt. Express 15, 11370-11384 (2007)

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