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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 18 — Sep. 3, 2007
  • pp: 11370–11384

Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry

Hanne Martinussen, Astrid Aksnes, and Helge E. Engan  »View Author Affiliations


Optics Express, Vol. 15, Issue 18, pp. 11370-11384 (2007)
http://dx.doi.org/10.1364/OE.15.011370


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Abstract

A heterodyne interferometer has been built in order to characterize vibrations on micro- and nanostructures. The interferometer offers the possibility of both absolute phase and high resolution absolute amplitude vibrational measurements. By using two acousto-optic modulators (AOMs) in one of the interferometer arms and varying the frequency inputs of both, the setup is designed to measure vibrations in the entire frequency range 0 - 1.2GHz. The system is here demonstrated on Capacitor Micromachined Ultrasonic Transducers (CMUTs) and a PZT transducer to show measurements from 5kHz up to 35MHz. We have measured absolute amplitudes with picometer resolution.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 6, 2007
Revised Manuscript: August 19, 2007
Manuscript Accepted: August 19, 2007
Published: August 23, 2007

Citation
Hanne Martinussen, Astrid Aksnes, and Helge E. Engan, "Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry," Opt. Express 15, 11370-11384 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-18-11370


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References

  1. K. Midtbø, A. Rønnekleiv, and D. T. Wang, "Fabrication and characterization of CMUTs realized by wafer bonding," in Proceedings of IEEE Ultrasonics Symp. (IEEE, 2006), pp. 934-937.
  2. K. Kokkonen, J. V. Knuuttila, V. P. Plessky, and MarttiM.  Salomaa, "Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry," in Proceedings of IEEE Ultrasonics Symp. (IEEE, 2003), pp. 1145-1148.
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  4. T. Chiba, "Amplitude and phase measurement of surface acoustic waves within a SAW filter having fan-shaped transducers and numerical simulations," in Proceedings of IEEE Ultrasonics Symp. (IEEE, 2005), pp. 1584-1587.
  5. C. Gorecki, "Sub-micrometric displacement measurements by an all-fiber laser heterodyne interferometer using digital phase demodulation," J. Opt.  26, 29-34 (1995). [CrossRef]
  6. J. E. Graebner, B. P. Barber, P. L. Gammel, and D. S. Greywall, "Dynamic visualization of sub°angstrom highfrequency surface vibration," Appl. Phys. Lett. 78, 159-161 (2001). [CrossRef]
  7. H. Martinussen, A. Aksnes, and H. E. Engan, "Heterodyne Interferometry for high sensitivity absolute amplitude vibrational measurements," Proc. SPIE 6292, 0Z1-0Z11 (2006).
  8. A. Aksnes, H. Martinussen, and H. E. Engan, "Characterization of acoustic vibrations on micro- and nanostructures with picometer sensitivity," Proc. SPIE 6293, 0A1-0A12 (2006).
  9. P. Hariharan, Basics of Interferometry (Academic Press, Inc., USA, 1992).

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