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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 19 — Sep. 17, 2007
  • pp: 11798–11807

Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

Juejun Hu, Vladimir Tarasov, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling  »View Author Affiliations

Optics Express, Vol. 15, Issue 19, pp. 11798-11807 (2007)

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We demonstrate, for the first time to the best of our knowledge, low-loss, Si-CMOS-compatible fabrication of single-mode chalcogenide strip waveguides. As a novel route of chalcogenide glass film patterning, lift-off allows several benefits: leverage with Si-CMOS process compatibility; ability to fabricate single-mode waveguides with core sizes down to submicron range; and reduced sidewall roughness. High-index-contrast Ge23Sb7S70 strip waveguides have been fabricated using lift-off with excellent uniformity of loss propagation and the lowest loss figure of reported to date. We also show that small core Ge23Sb7S70 rib waveguides can be fabricated via lift-off as well, with loss figures lower than 0.5 dB/cm. Additionally, we find through waveguide modal analysis that although overall transmission loss is low, the predominant source of this loss comes from scattering at the sidewalls.

© 2007 Optical Society of America

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(160.2750) Materials : Glass and other amorphous materials
(230.7390) Optical devices : Waveguides, planar
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Integrated Optics

Original Manuscript: August 3, 2007
Revised Manuscript: August 24, 2007
Manuscript Accepted: August 27, 2007
Published: August 31, 2007

Juejun Hu, Vladimir Tarasov, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling, "Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides," Opt. Express 15, 11798-11807 (2007)

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