OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 19 — Sep. 17, 2007
  • pp: 12088–12094

Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist

Liang-Ting Jiang, Tzu-Chien Huang, Chien-Ren Chiu, Chih-Yuan Chang, and Sen-Yeu Yang  »View Author Affiliations


Optics Express, Vol. 15, Issue 19, pp. 12088-12094 (2007)
http://dx.doi.org/10.1364/OE.15.012088


View Full Text Article

Enhanced HTML    Acrobat PDF (1140 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper reports a novel and effective method to fabricate microlens arrays on polycarbonate films by hybrid extrusion rolling embossing. The metallic cylinder mold bearing an array of micro-holes is fabricated using photolithography with dry film resist. During the extrusion rolling embossing process, the extruded PC film is immediately pressed against the surface of the roller mold. Under the influence of the rolling pressure and surface tension, an array of convex microlenses is formed. The uniformity and optical properties have been verified. An efficient continuous mass production technique has been demonstrated.

© 2007 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 18, 2007
Revised Manuscript: August 12, 2007
Manuscript Accepted: August 13, 2007
Published: September 7, 2007

Citation
Liang-Ting Jiang, Tzu-Chien Huang, Chien-Ren Chiu, Chih-Yuan Chang, and Sen-Yeu Yang, "Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist," Opt. Express 15, 12088-12094 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-19-12088


Sort:  Year  |  Journal  |  Reset  

References

  1. D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, "The manufacture of microlenses by melting photoresist," Meas. Sci. Technol. 1, 759-766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8 [CrossRef]
  2. X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask," Opt. Express 10, 303-308 (2002). [PubMed]
  3. W. X. Yu, and X. -C. Yuan, "UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask," Opt. Express 11, 2253-2258 (2003). [CrossRef] [PubMed]
  4. C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, "Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer," Opt. Express 14, 6253-6258 (2006). [CrossRef] [PubMed]
  5. V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, "Fabrication and characterization of microlens arrays using a cantilever-based spotter," Opt. Express 15, 6900-6907 (2007). [CrossRef] [PubMed]
  6. W. L. Chang, and P. K. Wei, "Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography," Opt. Express 15, 6774-6783 (2007). [CrossRef] [PubMed]
  7. S.-I. Chang, and J.-B. Yoon, "Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method," Opt. Express 12, 6366-6371 (2004). [CrossRef] [PubMed]
  8. R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, "Micro lens fabrication by means of femtosecond two photon photopolymerization," Opt. Express 14, 810-816 (2006). [CrossRef] [PubMed]
  9. B.K. Lee, D.S. Kim and T.H. Kwon, "Replication of microlens arrays by injection molding, Microsystem Technologies,"  10, 531-535 (2004).
  10. N. S. Ong, Y. H. Koh and Y. Q. Fu, "Microlens array produced using hot embossing process," Microelectron. Eng. 60, 365-379 (2002). [CrossRef]
  11. S.-M. Kim and S. Kang, "Replication qualities and optical properties of UV-moulded microlens arrays," J. Phys. D: Appl. Phys. 36, 2451-2456 (2003). [CrossRef]
  12. C. Y. Chang, S.Y. Yang, and J. L. Sheh, "A roller embossing process for rapid fabrication of microlens arrays on glass substrates," Microsyst. Technol. 12, 754-759 (2006). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited