Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method
Optics Express, Vol. 15, Issue 20, pp. 12890-12899 (2007)
http://dx.doi.org/10.1364/OE.15.012890
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Abstract
Based on our previously reported annular subaperture reconstruction algorithm with Zernike annular polynomials and matrix method, we provide an experimental demonstration by testing a parabolic mirror with the complementary annular subaperture interferometric method. By comparing the results of annular subaperture method with that of the classical auto-collimation method, it is shown that the reconstruction results are in good agreement with the auto-collimation measurement. In addition, we discuss some limitations of characterizing annular subaperture measurement data with finite Zernike coefficients in our algorithm, and also show the possibility of characterizing higher spatial frequency information with adequate Zernike coefficients. It is believable that the reported method can be extended to test the surface shape of some large concave aspheric mirrors with acceptable accuracy.
© 2007 Optical Society of America
OCIS Codes
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.1250) Optical design and fabrication : Aspherics
(220.4840) Optical design and fabrication : Testing
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: July 24, 2007
Revised Manuscript: August 30, 2007
Manuscript Accepted: September 2, 2007
Published: September 21, 2007
Citation
Xi Hou, Fan Wu, Li Yang, and Qiang Chen, "Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method," Opt. Express 15, 12890-12899 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-20-12890
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