OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 22 — Oct. 29, 2007
  • pp: 14601–14617

An optoelectronic measurement system for measuring 6-degree-of-freedom motion error of rotary parts

C. J. Chen, P. D. Lin, and W. Y. Jywe  »View Author Affiliations


Optics Express, Vol. 15, Issue 22, pp. 14601-14617 (2007)
http://dx.doi.org/10.1364/OE.15.014601


View Full Text Article

Enhanced HTML    Acrobat PDF (1510 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper presents an optoelectronic measurement system for measuring 6 degree-of-freedom (DOF) motion error of rotary parts. It comprises a pyramid-polygon-mirror, three laser diodes and three 2-axis position sensing detectors (PSD). The laser/PSD pairs are arranged evenly around the pyramid-polygon-mirror, which is mounted rigidly on and aligned axially with the rotary part to be measured. Laser rays from the laser diodes are reflected off the respective mirrors to the respective PSDs. The incidence point of the laser ray on the PSD’s surface varies with the pose of the pyramid-polygon-mirror, allowing the PSD to register variation in the mirror and, thereby, the rotary part. With appropriate orientation of the lasers and PSDs, this system can measure variation (error) during rotation of a rotary part. By use of skew-ray tracing and first order Taylor series expansion, the system achieves measurement of translational and rotational motion errors for each Cartesian axis. To validate the proposed methodology, a laboratory prototype system is built. System verification and stability tests are conducted to evaluate its performance. Stability test results show that measurement errors and maximum crosstalk are within ±1 μm in translation and ±1.5 arc sec in rotation.

© 2007 Optical Society of America

OCIS Codes
(080.2740) Geometric optics : Geometric optical design
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 23, 2007
Revised Manuscript: October 12, 2007
Manuscript Accepted: October 14, 2007
Published: October 19, 2007

Citation
C. J. Chen, P. D. Lin, and W. Y. Jywe, "An optoelectronic measurement system for measuring 6-degree-of-freedom motion error of rotary parts," Opt. Express 15, 14601-14617 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-22-14601


Sort:  Year  |  Journal  |  Reset  

References

  1. J. Ni and S. M. Wu, "An on-line measurement technique for machine volumetric error compensation," ASME J. Eng. Indus. 115, 85-92 (1993).
  2. P. D. Lin and K. F. Ehmann, "Sensing of motion related errors in multi-axis machines," ASME J. Dyn. Syst. 118, 425-433 (1996). [CrossRef]
  3. S. W. Lee, R. Mayor, and J. Ni, "Development of a six-degree-of-freedom geometric error measurement System for a Meso-Scale Machine Tool," ASME J. Manu. Sci. Eng. 127, 857-865 (2005). [CrossRef]
  4. E. W. Bae, J. A. Kim, and S. H. Kim, "Multi-degree-of-freedom displacement system for milli-structures," Mea. Sci. Technol. 12, 1495-1502 (2001). [CrossRef]
  5. J. A. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, "Design methods for six-degree-of-freedom-displacement systems using cooperative targets," Precis. Eng. 26, 99-104 (2002). [CrossRef]
  6. C. H. Liu, W. Y. Jywe, L. H. Shyu, and C. J. Chen, "Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table," Precis. Eng. 29, 440-448 (2005). [CrossRef]
  7. W. Y. Jywe, C. J. Chen, W. H. Hsieh, P. D. Lin, H. H. Jwo and T. Y. Yang, "A novel simple and low cost 4 degree of freedom angular indexing calibrating techniques for a precision rotary table," Int. J. Mach. Tool Manu. 47, 1978-1987 (2007). [CrossRef]
  8. E. H. Bokelberg, H. J. SommerIII, and M. W. Trethewey, "A six-degree-of-freedom laser vibormeter, part I and II," J. Sound Vib. 178, 643-667 (1994). [CrossRef]
  9. P. D. Lin and T. T. Liao, "Analysis of Optical Elements with Flat Boundary Surfaces," J. Appl. Opt. 42, 1191-1202 (2003). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited