OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 23 — Nov. 12, 2007
  • pp: 14967–14972

High speed in situ depth profiling of ultrafast micromachining

Paul J.L. Webster, Matthew S. Muller, and James M. Fraser  »View Author Affiliations


Optics Express, Vol. 15, Issue 23, pp. 14967-14972 (2007)
http://dx.doi.org/10.1364/OE.15.014967


View Full Text Article

Enhanced HTML    Acrobat PDF (998 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate real-time depth profiling of ultrafast micro-machining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 μm. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic.

© 2007 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(140.3390) Lasers and laser optics : Laser materials processing
(320.7120) Ultrafast optics : Ultrafast phenomena
(350.5400) Other areas of optics : Plasmas

ToC Category:
Laser Micromachining

History
Original Manuscript: August 8, 2007
Revised Manuscript: September 15, 2007
Manuscript Accepted: October 22, 2007
Published: October 29, 2007

Virtual Issues
Vol. 2, Iss. 12 Virtual Journal for Biomedical Optics

Citation
Paul J. L. Webster, Matthew S. Muller, and James M. Fraser, "High speed in situ depth profiling of ultrafast micromachining," Opt. Express 15, 14967-14972 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-23-14967


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben and A. Tunnermann "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63,109-115 (1996). [CrossRef]
  2. W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, "Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring," Appl. Phys. Lett. 88,103902 (2006). [CrossRef]
  3. D. G. Papazoglou, V. Papadakis, and D. Anglos "In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures," J. Anal. At. Spectrom. 19,483-488 (2004). [CrossRef]
  4. B. J. Vakoc, G. J. Tearney and B. E. Bouma "Real-time microscopic visualization of tissue response to laser thermal therapy," J. Biomed. Opt. 12,020501 (2007). [CrossRef] [PubMed]
  5. R. Lausten and P. Balling‘On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery," Appl. Phys. Lett. 79,884-886 (2001). [CrossRef]
  6. C. S. Nielsen and P. Balling "Deep drilling of metals with ultrashort laser pulses: A two-stage process," J. Appl. Phys. 99,093101 (2006). [CrossRef]
  7. A. F. Fercher, W. Drexler, C. K. Hitzenberger and T. Lasser, "Optical coherence tomography-principles and applications," Rep. Prog. Phys. 66,239-303 (2003). [CrossRef]
  8. R. Huber, D.C Adler and J. G. Fujimoto, "Buffered Fourier domain mode locking: unidirectional swept laser sources for optical coherence tomography imaging at 370,000 lines/s," Opt. Lett. 31,2975-2977 (2006). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited