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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 24 — Nov. 26, 2007
  • pp: 15759–15766

A compact system for simultaneous measurement of linear and angular displacements of nano-stages

Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, Taebong Eom, Mijung Cho, and Hong Jin Kong  »View Author Affiliations


Optics Express, Vol. 15, Issue 24, pp. 15759-15766 (2007)
http://dx.doi.org/10.1364/OE.15.015759


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Abstract

We report on a novel compact interferometery system for measuring parasitic motions of a precision stage. It is a combination of a Michelson interferometer with an auto-collimator, of which full physical dimension is mere 70 mm×80 mm×35 mm (W×L×H) including optical components, photo-detectors, and electronic circuits. Since the beams, which measure displacement and angle, can be directed at the same position on the moving mirror, the system is applicable for testing small nano-stages where commercial interferometers are not able to be used. And thus, errors from nano-scale deformation of the moving mirror can be minimized. We find that the residual errors of linear and angular motion measurements are 2.5 nm in peak-to-peak and 0.2″, respectively.

© 2007 Optical Society of America

OCIS Codes
(120.1880) Instrumentation, measurement, and metrology : Detection
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 31, 2007
Revised Manuscript: November 4, 2007
Manuscript Accepted: November 8, 2007
Published: November 13, 2007

Citation
Jae-Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, Taebong Eom, Mijung Cho, and Hong Jin Kong, "A compact system for simultaneous measurement of linear and angular displacements of nano-stages," Opt. Express 15, 15759-15766 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-24-15759


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References

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