OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 24 — Nov. 26, 2007
  • pp: 15759–15766

A compact system for simultaneous measurement of linear and angular displacements of nano-stages

Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, Taebong Eom, Mijung Cho, and Hong Jin Kong  »View Author Affiliations

Optics Express, Vol. 15, Issue 24, pp. 15759-15766 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (294 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report on a novel compact interferometery system for measuring parasitic motions of a precision stage. It is a combination of a Michelson interferometer with an auto-collimator, of which full physical dimension is mere 70 mm×80 mm×35 mm (W×L×H) including optical components, photo-detectors, and electronic circuits. Since the beams, which measure displacement and angle, can be directed at the same position on the moving mirror, the system is applicable for testing small nano-stages where commercial interferometers are not able to be used. And thus, errors from nano-scale deformation of the moving mirror can be minimized. We find that the residual errors of linear and angular motion measurements are 2.5 nm in peak-to-peak and 0.2″, respectively.

© 2007 Optical Society of America

OCIS Codes
(120.1880) Instrumentation, measurement, and metrology : Detection
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 31, 2007
Revised Manuscript: November 4, 2007
Manuscript Accepted: November 8, 2007
Published: November 13, 2007

Jae-Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, Taebong Eom, Mijung Cho, and Hong Jin Kong, "A compact system for simultaneous measurement of linear and angular displacements of nano-stages," Opt. Express 15, 15759-15766 (2007)

Sort:  Year  |  Journal  |  Reset  


  1. R. Leach, J. Haycocks, K. Jackson, A. Lewis, S. Oldfield, and A. Yacot, "Advances in traceable nanometrology at the National Physical Laboratory," Nanotechnology 12, R1-R6 (2001). [CrossRef]
  2. J.-A. Kim, J. W. Kim, B. C. Park, and T. B. Eom, "Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope," Meas. Sci. Technol. 17, 1792-1800 (2006). [CrossRef]
  3. S. Gonda, T. Kurosawa and Y. Tanimura, "Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology," Meas. Sci. Technol. 10, 986-993 (1999). [CrossRef]
  4. M. Holmes, R. Hocken, and D. Trumper, "The long-range scanning stage: a novel platform for scanned-probe microscopy," Precis. Eng. 24, 191-209 (2000). [CrossRef]
  5. W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, "Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage," Precis. Eng. 30, 96-103 (2006). [CrossRef]
  6. A. Bergamin, G. Cavagnero, and G. Mana, "A displacement and angle interferometer with subatomic resolution," Rev. Sci. Instrum. 64, 3076-3080 (1993). [CrossRef]
  7. G. D. Chapman, "Interferometric angular measurement," Appl. Opt. 13, 1646-1651 (1974). [CrossRef] [PubMed]
  8. J, S. Oh, E. D. Bae, T. Keem, and S.-W. Kim, "Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry," Int. J. Mach. Tools Manuf. 46, 1748-1752 (2006). [CrossRef]
  9. P. R. Yoder, Jr., E. R. Schlesinger, and J. L. Chickvary, "Active annular-beam laser autocollimator system," Appl. Opt. 14, 1890-1895 (1975). [CrossRef] [PubMed]
  10. J. Yuan, X. Long, and K. Yang, "Temperature-controlled autocollimator with ultrahigh angular measuring precision," Rev. Sci. Instrum. 76, 125106 (2005). [CrossRef]
  11. G. R. Fowles, Introduction to Modern Optics (Dover Publications, 1989), Chap. 2.
  12. C.-M. Wu, C.-S. Su, and G.-S. Peng, "Correction of nonlinearity in one-frequency optical interferometry," Meas. Sci. Technol. 7, 520-524 (1996). [CrossRef]
  13. T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa, "Removing nonlinearity of a homodyne interferomerer by adjusting the gains of its quadrature detector systems," Appl. Opt. 43, 2443-2448 (2004). [CrossRef] [PubMed]
  14. T. Eom, D. Chung, and J. Kim, "A small angle generator based on a laser angle interferometer," Int. J. Precis. Eng. Manuf. 8, 20-23 (2007).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited