OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 24 — Nov. 26, 2007
  • pp: 16210–16215

Experimental demonstration of a wafer-level flexible probe for optical waveguide testing

Abdullah J. Zakariya, Tao Liu, and Roberto R. Panepucci  »View Author Affiliations

Optics Express, Vol. 15, Issue 24, pp. 16210-16215 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (4786 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A flexible optical probe that accomplishes wafer-level directional coupling of light into optical waveguides is investigated theoretically and experimentally. Simulated results indicate high coupling efficiencies in excess of 80% for a range of parameters. Probe fabrication was implemented using SU8 as flexible waveguide material. Coupling of light from flexible probe to an S-shaped test waveguide demonstrated 11% efficiency compared to direct butt coupling. These results may lead to increased yield, shorter development cycles and overall savings in PLC packaging costs.

© 2007 Optical Society of America

OCIS Codes
(230.7370) Optical devices : Waveguides
(250.5530) Optoelectronics : Pulse propagation and temporal solitons

ToC Category:
Optical Devices

Original Manuscript: October 8, 2007
Revised Manuscript: November 16, 2007
Manuscript Accepted: November 20, 2007
Published: November 21, 2007

Abdullah J. Zakariya, Tao Liu, and Roberto R. Panepucci, "Experimental demonstration of a wafer-level flexible probe for optical waveguide testing," Opt. Express 15, 16210-16215 (2007)

Sort:  Year  |  Journal  |  Reset  


  1. S.-H. Huang and F.-G. Tseng, "Development of a monolithic total internal reflection-based biochip utilizing a microprism array for fluorescence sensing," J. Micromech. Microeng. 15, 1302-1304 (2005). [CrossRef]
  2. K. Johannessen, "Optical Probe for Wafer Testing," USA: Intel Corporation, 2006.
  3. K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, "Optical-fiberbased measurement of an ultrasmall volume, high-Q photonic crystal microcavity," Phys. Rev. B,  70, 081306-1-4 (2004). [CrossRef]
  4. R. Panepucci, A. Zakariya, T. Liu, "Flexible optical wire-bonding for planar lightwave circuits packaging" Proc. SPIE 6645, (2007)
  5. C. Pollock and M. Lipson, Integrated Photonics. Massachusetts: Kluwar Academic Publishers, 2003.
  6. M. Young, Optics and Lasers: Including Fibers and Optical Waveguide, 4 ed. Berlin; New York: Springer-Verlag, 1993.
  7. Rsoft Design Group, "Rsoft Component Design Products-BeamPROP ", 2006.
  8. R. Panepucci, V.R. Almeida, M. Jones, B.H. Kim Photonic Crystals in Polymers by Direct Electron-Beam Lithography Presenting a Photonic Bandgap," J.Vac. Sci. Technol. B, 22, 3348-335, (2004). [CrossRef]
  9. T. Liu, M. S. Nawrocka, R. R. Panepucci," Polymer waveguide resonator with distributed Bragg reflectors," Proc. SPIE 6645, (2007).
  10. J. Martinez and R. Panepucci,"Design, Fabrication, and Characterization of a Microgripper Device," in Proceedings of the Florida Conference on Recent Advances in Robotics, (2007).
  11. N. Chronis and L.P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution," J. Microelectromech. Syst. 14, 857-63 (2005). [CrossRef]
  12. T. C. Sum, A. A. Bettiol, J. A. van Kan and F. Watt," Proton beam writing of low-loss polymer optical waveguides," Appl. Phys. Lett. 83, 1707-1709 (2003). [CrossRef]
  13. S. Chang, J. Warren, and F. Chiang,"Mechanical Testing of Epon SU8 SIEM," in Proceedings of Microscale Systems: Mechanics & Measurement Symposium, (2000), pp. 46-49.
  14. C. Choi, L. Lin, Y. Liu, J. Choi, L. Wang, D. Haas, J. Magera, and R. Chen, "Flexible Optical Waveguide Film Fabrications and Optoelectronic Devices Integration for Full Embedded Board-Level Optical Interconnects," IEEE trans.J. Lightwave Technol. 22, 2168-2177 (2004). [CrossRef]
  15. K. Kim, J. Yi, and M. Oh, "Flexible Bragg reflection waveguide devices fabricated on a plastic substrate" Proc. SPIE 6645, (2007).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited