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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 25 — Dec. 10, 2007
  • pp: 16348–16356

13.5 nm EUV generation from tin-doped droplets using a fiber laser

Simi A. George, Kai-Chung Hou, Kazutoshi Takenoshita, Almantas Galvanauskas, and Martin C. Richardson  »View Author Affiliations


Optics Express, Vol. 15, Issue 25, pp. 16348-16356 (2007)
http://dx.doi.org/10.1364/OE.15.016348


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Abstract

A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported. With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8×1010 W/cm2. This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured.

© 2007 Optical Society of America

OCIS Codes
(300.0300) Spectroscopy : Spectroscopy
(340.0340) X-ray optics : X-ray optics

ToC Category:
Spectroscopy

History
Original Manuscript: September 28, 2007
Revised Manuscript: November 15, 2007
Manuscript Accepted: November 17, 2007
Published: November 26, 2007

Citation
Simi A. George, Kai-Chung Hou, Kazutoshi Takenoshita, Almantas Galvanauskas, and Martin C. Richardson, "13.5 nm EUV generation from tin-doped droplets using a fiber laser," Opt. Express 15, 16348-16356 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-16348


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