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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 25 — Dec. 10, 2007
  • pp: 16546–16560

Distortion of 3D SU8 Photonic Structures Fabricated by Four-beam Holographic Lithography with Umbrella Configuration

Xuelian Zhu, Yongan Xu, and Shu Yang  »View Author Affiliations

Optics Express, Vol. 15, Issue 25, pp. 16546-16560 (2007)

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We present a quantitative study of the distortion from a three-term diamond-like structure fabricated in SU8 polymer by four-beam holographic lithography. In the study of the refraction effect, theory suggests that the lattice in SU8 should be elongated in the [111] direction but have no distortion in the (111) plane, and each triangular-like hole array in the (111) plane would rotate by ~30° away from that in air. Our experiments agree with the prediction on the periodicity in the (111) plane and the rotation due to refraction effect, however, we find that the film shrinkage during lithographic process has nearly compensated the predicted elongation in the [111] direction. In study of photonic bandgap (PBG) properties of silicon photonic crystals templated by the SU8 structure, we find that the distortion has decreased quality of PBG.

© 2007 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(120.5710) Instrumentation, measurement, and metrology : Refraction
(260.3160) Physical optics : Interference
(160.5298) Materials : Photonic crystals

ToC Category:
Photonic Crystals

Original Manuscript: September 28, 2007
Revised Manuscript: November 18, 2007
Manuscript Accepted: November 18, 2007
Published: November 29, 2007

Xuelian Zhu, Yongan Xu, and Shu Yang, "Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration," Opt. Express 15, 16546-16560 (2007)

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