Laser-lithography on non-planar surfaces

doi:10.1364/OE.15.001167

Laser-lithography on non-planar surfaces

Daniela Radtke and Uwe D. Zeitner »View Author Affiliations

Optics Express, Vol. 15, Issue 3, pp. 1167-1174 (2007)
http://dx.doi.org/10.1364/OE.15.001167

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Abstract
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Abstract

An extensively modified laser-lithography system specially developed for realization of micro-optical profiles on non-planar surfaces is presented. This extended system offers new possibilities of fabricating micro-optical elements without the technology related restriction of surface shape that existed so far. A diffractive lens on a convex spherical substrate is designed and fabricated as an example for hybrid achromatic refractive-diffractive elements to demonstrate the functionality of the system and the wide range of possible new applications.

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: January 22, 2007
Manuscript Accepted: January 22, 2007
Published: February 5, 2007

Citation
Daniela Radtke and Uwe D. Zeitner, "Laser-lithography on non-planar surfaces," Opt. Express 15, 1167-1174 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-3-1167

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References

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U. D. Zeitner, and P. Dannberg, "Double-sided hybrid micro-optical elements combining functions of multistage optical systems," Proc. SPIE 4440, 44-50 (2001). [CrossRef]
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