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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 3 — Feb. 5, 2007
  • pp: 1191–1204

Properties of induced polarization evanescent reflection with a solid immersion lens (SIL)

Tao Chen and Tom D. Milster  »View Author Affiliations

Optics Express, Vol. 15, Issue 3, pp. 1191-1204 (2007)

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Properties of the induced polarization signal with a solid immersion lens (SIL) are investigated by experiments and simulations. A LaSFN9 SIL (NA=1.5) is used in the experiment. Physics of the induced polarization signal are described for several configurations of optical systems and substrates. Induced polarization signals from evanescent-wave coupling to dielectric, semiconductor and metal substrates are studied in detail. It is shown that surface plasmon waves are excited with Au substrates and the induced polarization signal is affected by the surface plasmon waves. Simulation results of the induced polarization signal for a gallium phosphide SIL (NA=2.64) are discussed.

© 2007 Optical Society of America

OCIS Codes
(210.0210) Optical data storage : Optical data storage
(240.6680) Optics at surfaces : Surface plasmons
(260.0260) Physical optics : Physical optics
(260.6970) Physical optics : Total internal reflection

ToC Category:
Optics at Surfaces

Original Manuscript: December 11, 2006
Revised Manuscript: January 24, 2007
Manuscript Accepted: January 25, 2007
Published: February 5, 2007

Tao Chen and Tom D. Milster, "Properties of induced polarization evanescent reflection with a solid immersion lens (SIL)," Opt. Express 15, 1191-1204 (2007)

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  1. S. M. Mansfield and G. S. Kino, "Solid immersion microscope," Appl. Phys. Lett. 57, 2615-2616 (1990). [CrossRef]
  2. Q. Wu, L. Ghislain, and V. B. Elings, "Imaging with solid immersion lenses, spatial resolution, and applications," Proc. IEEE 88, 1491-1498 (2000). [CrossRef]
  3. C. D. Poweleit, A. Gunther, S. Goodnick, and J. Menéndez, "Raman imaging of patterned silicon using a solid immersion lens," Appl. Phys. Lett. 73, 2275-2277 (1998). [CrossRef]
  4. L. P. Ghislain, V. B. Elings, K. B. Crozier, S. R. Manalis, S. C. Minne, K. Wilder, G. S. Kino, and C. F. Quate, "Near-field photolithography with a solid immersion lens," Appl. Phys. Lett.  74, 501-503 (1999). [CrossRef]
  5. T. D. Milster, "Near-field optical data storage: avenues for improved performance," Opt. Eng. 40, 2255-2260 (2001). [CrossRef]
  6. K. Sendur, C. Peng, and W. Challener, "Near-field radiation from a ridge waveguide transducer in the vicinity of a solid immersion lens," Phys. Rev. Lett. 94, 043901 (2005). [CrossRef] [PubMed]
  7. M. Lang, T. D. Milster, T. Minamitani, G. Borek, and D. Brown, "Fabrication and characterization of sub-100 km diameter gallium phosphide solid immersion lens arrays," Jpn. J. Appl. Phys. 44, 3385-3387 (2005). [CrossRef]
  8. Q. Wu, G. D. Feke, R. D. Grober, and L. P. Ghislain, "Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens," Appl. Phys. Lett.  75, 4064-4066 (1999). [CrossRef]
  9. T. D. Milster, J. S. Jo, K. Hirota, K. Shimura, and Y. Zhang, "The nature of the coupling field in optical data storage using solid immersion lenses," Jpn. J. Appl. Phys. 38, 1793-1794 (1999). [CrossRef]
  10. T. Ishimoto, K. Saito, M. Shinoda, T. Kondo, A. Nakaoki, and M. Yamamoto, "Gap servo system for a biaxial device using an optical gap signal in a near field readout system," Jpn. J. Appl. Phys. 42, 2719-2724 (2003). [CrossRef]
  11. T. Chen, T. D. Milster, S. H. Yang, D. Hansen, "Evanescent imaging with induced polarization by using a solid immersion lens," Opt. Lett. 32,124-126 (2007). [CrossRef]
  12. T. Chen, T. D. Milster, J. K. Park, B. McCarthy, D. Sarid, C. Poweleit, and J. Menendez, "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design," Opt. Eng. 45, 103002 (2006). [CrossRef]
  13. A. Otto, "Excitation of nonradiative surface plasma waves in silver by the method of frustrated total reflection," Z. Phys. 216, 398-410 (1968). [CrossRef]
  14. D. Sarid, R. T. Deck, A. E. Craig, R. K. Hickernell, R. S. Jameson, and J. J. Fasano, "Optical field enhancement by long-range surface-plasma waves," Appl. Opt. 21, 3993-3995 (1982). [CrossRef] [PubMed]
  15. B. Ran and S. G. Lipson, "Comparison between sensitivities of phase and intensity detection in surface plasmon resonance," Opt. Express 14, 5641-5650 (2006). [CrossRef] [PubMed]
  16. A. Otto, "The surface polariton response in attenuated total reflection," in Polaritons: Proceedings of the First Taormina Research Conference on the Structure of Matter, E. Burstein and F. Demartina, ed. (Pentagon, New York, 1974), pp. 117-121.
  17. D. Nam, T. D. Milster and T. Chen, "Potential of solid immersion lithography using I-line and KrF light source," Proc. SPIE 5754, 1049-1055 (2004). [CrossRef]
  18. B. Richards and E. Wolf, "Electromagnetic diffraction in optical system.2. Structure of the image field in an aplanatic system," Proc. R. Soc. London, Ser. A 253, 358-379 (1959). [CrossRef]
  19. D. G. Flagello, T. Milster, and A. E. Rosenbluthk, "Theory of high-NA imaging in homogeneous thin films," J. Opt. Soc. Am. A 13, 53-64 (1996). [CrossRef]
  20. T. D. Milster, J. S. Jo, and K. Hirota, "Roles of propagating and evanescent waves in solid immersion lens system," Appl. Opt. 38, 5046-5057 (1999). [CrossRef]
  21. H. A. Macleod, Thin Film Optical Filters (McGraw-Hill, New York, 1989).

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