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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 3 — Feb. 5, 2007
  • pp: 1222–1227

Nano electro-mechanical optoelectronic tunable VCSEL

Michael C.Y. Huang, Ye Zhou, and Connie J. Chang-Hasnain  »View Author Affiliations

Optics Express, Vol. 15, Issue 3, pp. 1222-1227 (2007)

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We report a novel electrostatic actuated nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL) centered at 850 nm. By integrating a movable, single-layer (230 nm), high-index-contrast subwavelength grating (HCG) as the VCSEL top mirror, single mode emission (SMSR >40 dB) and continuous wavelength tuning (~2.5 nm) was obtained at room temperature under CW operation. The small footprint of HCG enables the scaling down of each of the cantilever dimensions by a factor of 10, leading to 1000 times reduction in mass, which potentially increases the mechanical resonant frequency and tuning speed.

© 2007 Optical Society of America

OCIS Codes
(140.3600) Lasers and laser optics : Lasers, tunable
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers

ToC Category:

Original Manuscript: October 31, 2006
Revised Manuscript: January 17, 2007
Manuscript Accepted: January 17, 2007
Published: February 5, 2007

Michael C. Y. Huang, Ye Zhou, and Connie J. Chang-Hasnain, "Nano electro-mechanical optoelectronic tunable VCSEL," Opt. Express 15, 1222-1227 (2007)

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