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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 3 — Feb. 5, 2007
  • pp: 872–877

The con-focal method on verifying focal plane of MAS machine

Wei Huang and Franco Cerrina  »View Author Affiliations

Optics Express, Vol. 15, Issue 3, pp. 872-877 (2007)

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The Maskless DNA Array Synthesizer (MAS) is very efficient and flexible device on custom designed DNA array fabricating. To make the MAS’s focal plane keep stable is important during the chip synthesizing process. In this paper we bring a creative idea using con-focal method to verify focal plane of MAS machine. That method is very sensitive on focal plane verification and could be used on other optical lithography system or the projecting system, which need real time focal plane precision control.

© 2007 Optical Society of America

OCIS Codes
(220.1140) Optical design and fabrication : Alignment
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Geometrical optics

Original Manuscript: November 7, 2006
Revised Manuscript: December 24, 2006
Manuscript Accepted: December 25, 2006
Published: February 5, 2007

Wei Huang and Franco Cerrina, "The con-focal method on verifying focal plane of MAS machine," Opt. Express 15, 872-877 (2007)

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  1. Sangeet Singh-Gasson &Roland D. Green, "Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array," Nature Biotechnol. 17,974 (1999). [CrossRef]
  2. T. Wilson, C. R. J. Sheppard, Theory and Practice of Scanning Optical Microscopy, (Academic Press, London, 1984), Chap. 3.
  3. C.J.R. Sheppard and D.M. Shotton, Confocal Laser Scanning Microscopy, (Springer, New York, 1997), Chap. 3.

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