A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively.

© 2007 Optical Society of America

1. A. Alon and J. Finkelstein, World Patent WO 98/37554 (1998).
2. A. Alon and T. Kosoburd, ‘‘Multi-beam optical pickup,’’ U.S. Patent. No. 6,411,573 (2002).
3. R. Katayama, K. Yoshihara, Y. Yamanaka, M. Tsunekane, K. Kayanuma, T. Iwanaga, O. Okada, and Y. Ono, ‘‘Multi-beam optical disk drive for high data transfer rate systems,’’ Jpn. J. Appl. Phys., Part 1  31~2B, 630-634 (1992). [CrossRef]
4. H. Okumura, K. Arai, N. Kawamura, H. Tokumaru, and H. Okuda, ‘‘Multi-beam light source using optical waveguide for optical recording,’’Proc. SPIE 4090, 329-334 (2000). [CrossRef]
5. Hsi-Fu Shih, "Multiple-beam liquid crystal grating for the recordable optical pickup head," Jpn. J. Appl. Phys.,  44, 1815-1817 (2005). [CrossRef]
6. W.-H. Lee, "High effieicency multiple gratings," Appl. Opt. 18,2152-2158 (1979). [CrossRef] [PubMed]
7. E. K. Chan and R. W. Dutton, "Effects of capacitors, resistors and residual charge on the static and dynamic performance of electrostatically-actuated devices," Proc. SPIE 3680,120-130 (1999). [CrossRef]
8. M. A. Rosa, D. D. Bruyker, A. R. Volkel, E. Peeters, and J. Dunec, "A novel external electrode configuration for the electrostatic actuation of MEMS based devices," J. Micromech. Microeng. 14,446-451(2004). [CrossRef]
9. J. C. Chiou and Y. J. Lin, "A novel large displacement electrostatic actuator: pre-stress comb-drive actuator," J. Micromech. Microeng. 15, 1641-1648 (2005). [CrossRef]
10. F. P. Beer and E. R. Johnston, Mechanics of Materials, 2nd Ed., (McGraw-Hill, NY, 1992)

Appl. Opt.

• W.-H. Lee, "High effieicency multiple gratings," Appl. Opt. 18,2152-2158 (1979). [CrossRef] [PubMed]

J. Micromech. Microeng.

• M. A. Rosa, D. D. Bruyker, A. R. Volkel, E. Peeters, and J. Dunec, "A novel external electrode configuration for the electrostatic actuation of MEMS based devices," J. Micromech. Microeng. 14,446-451(2004). [CrossRef]
• J. C. Chiou and Y. J. Lin, "A novel large displacement electrostatic actuator: pre-stress comb-drive actuator," J. Micromech. Microeng. 15, 1641-1648 (2005). [CrossRef]

Jpn. J. Appl. Phys.

• R. Katayama, K. Yoshihara, Y. Yamanaka, M. Tsunekane, K. Kayanuma, T. Iwanaga, O. Okada, and Y. Ono, ‘‘Multi-beam optical disk drive for high data transfer rate systems,’’ Jpn. J. Appl. Phys., Part 1  31~2B, 630-634 (1992). [CrossRef]
• Hsi-Fu Shih, "Multiple-beam liquid crystal grating for the recordable optical pickup head," Jpn. J. Appl. Phys.,  44, 1815-1817 (2005). [CrossRef]

Proc. SPIE

• H. Okumura, K. Arai, N. Kawamura, H. Tokumaru, and H. Okuda, ‘‘Multi-beam light source using optical waveguide for optical recording,’’Proc. SPIE 4090, 329-334 (2000). [CrossRef]
• E. K. Chan and R. W. Dutton, "Effects of capacitors, resistors and residual charge on the static and dynamic performance of electrostatically-actuated devices," Proc. SPIE 3680,120-130 (1999). [CrossRef]

Other

• F. P. Beer and E. R. Johnston, Mechanics of Materials, 2nd Ed., (McGraw-Hill, NY, 1992)
• A. Alon and J. Finkelstein, World Patent WO 98/37554 (1998).
• A. Alon and T. Kosoburd, ‘‘Multi-beam optical pickup,’’ U.S. Patent. No. 6,411,573 (2002).

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