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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 4 — Feb. 19, 2007
  • pp: 1408–1414

Micro actuated grating for multi-beam optical pickups

Chi-Hung Lee, Yi Chiu, and Han-Ping D. Shieh  »View Author Affiliations

Optics Express, Vol. 15, Issue 4, pp. 1408-1414 (2007)

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A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively.

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(210.0210) Optical data storage : Optical data storage
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics

ToC Category:
Diffraction and Gratings

Original Manuscript: December 12, 2006
Revised Manuscript: January 27, 2007
Manuscript Accepted: February 6, 2007
Published: February 19, 2007

Chi-Hung Lee, Yi Chiu, and Han-Ping D. Shieh, "Micro actuated grating for multi-beam optical pickups," Opt. Express 15, 1408-1414 (2007)

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  1. A. Alon and J. Finkelstein, World Patent WO 98/37554 (1998).
  2. A. Alon and T. Kosoburd, ‘‘Multi-beam optical pickup,’’ U.S. Patent. No. 6,411,573 (2002).
  3. R. Katayama, K. Yoshihara, Y. Yamanaka, M. Tsunekane, K. Kayanuma, T. Iwanaga, O. Okada, and Y. Ono, ‘‘Multi-beam optical disk drive for high data transfer rate systems,’’ Jpn. J. Appl. Phys., Part 1  31~2B, 630-634 (1992). [CrossRef]
  4. H. Okumura, K. Arai, N. Kawamura, H. Tokumaru, and H. Okuda, ‘‘Multi-beam light source using optical waveguide for optical recording,’’Proc. SPIE 4090, 329-334 (2000). [CrossRef]
  5. Hsi-Fu Shih, "Multiple-beam liquid crystal grating for the recordable optical pickup head," Jpn. J. Appl. Phys.,  44, 1815-1817 (2005). [CrossRef]
  6. W.-H. Lee, "High effieicency multiple gratings," Appl. Opt. 18,2152-2158 (1979). [CrossRef] [PubMed]
  7. E. K. Chan and R. W. Dutton, "Effects of capacitors, resistors and residual charge on the static and dynamic performance of electrostatically-actuated devices," Proc. SPIE 3680,120-130 (1999). [CrossRef]
  8. M. A. Rosa, D. D. Bruyker, A. R. Volkel, E. Peeters, and J. Dunec, "A novel external electrode configuration for the electrostatic actuation of MEMS based devices," J. Micromech. Microeng. 14,446-451(2004). [CrossRef]
  9. J. C. Chiou and Y. J. Lin, "A novel large displacement electrostatic actuator: pre-stress comb-drive actuator," J. Micromech. Microeng. 15, 1641-1648 (2005). [CrossRef]
  10. F. P. Beer and E. R. Johnston, Mechanics of Materials, 2nd Ed., (McGraw-Hill, NY, 1992)

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