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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 5 — Mar. 5, 2007
  • pp: 2033–2046

Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction

Tatiana Novikova, Antonello De Martino, Pavel Bulkin, Quang Nguyen, Bernard Drévillon, Vladimir Popov, and Alexander Chumakov  »View Author Affiliations

Optics Express, Vol. 15, Issue 5, pp. 2033-2046 (2007)

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The feasibility of metrological characterization of the one-dimensional (1D) holographic gratings, used in the nanoimprint molding tool fabrication step, by spectroscopic Mueller polarimetry in conical diffraction is investigated. The studied samples correspond to two different steps of the replicated diffraction grating fabrication process. We characterized master gratings that consist of patterned resist layer on chromium-covered glass substrate and complementary (replica) gratings made of nickel. The profiles of the gratings obtained by fitting the experimental spectra of Mueller matrix coefficients taken at different azimuthal angles were confirmed by atomic force microscopy (AFM) measurements. The calculated profiles of corresponding master and replica gratings are found to be complementary. We conclude that the Mueller polarimetry, as a fast and non-contact optical characterization technique, can provide the basis for the metrology of the molding tool fabrication step in the nanoimprint technique.

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(090.1970) Holography : Diffractive optics
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Diffraction and Gratings

Original Manuscript: November 29, 2006
Manuscript Accepted: January 22, 2007
Published: March 5, 2007

Tatiana Novikova, Antonello De Martino, Pavel Bulkin, Quang Nguyen, Bernard Drévillon, Vladimir Popov, and Alexander Chumakov, "Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction," Opt. Express 15, 2033-2046 (2007)

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