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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 6 — Mar. 19, 2007
  • pp: 3581–3588

Planar double-grating microspectrometer

S. Grabarnik, R. Wolffenbuttel, A. Emadi, M. Loktev, E. Sokolova, and G. Vdovin  »View Author Affiliations

Optics Express, Vol. 15, Issue 6, pp. 3581-3588 (2007)

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We report on a miniature spectrometer with a volume of 0.135 cm3 and dimensions of 3×3×11 mm, mounted directly on the surface of a CCD sensor. The spectrometer is formed by two flat diffraction gratings that are designed to perform both the dispersion and imaging functions, eliminating the need for any spherical optics. Two separate parts of the device were fabricated with the single-mask 1 μm lithography on a single glass wafer. The wafer was diced and the device was assembled and directly mounted onto a CCD sensor. The resolution of 3 nm, spectral range of 450 to 750 nm and the optical throughput of ∼9% were measured to be in a complete agreement with the model used for the development of the device.

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(080.2740) Geometric optics : Geometric optical design
(300.6190) Spectroscopy : Spectrometers
(350.3950) Other areas of optics : Micro-optics

ToC Category:

Original Manuscript: January 25, 2007
Revised Manuscript: March 4, 2007
Manuscript Accepted: March 4, 2007
Published: March 19, 2007

Semen Grabarnik, Reinoud Wolffenbuttel, Arwin Emadi, Mikhail Loktev, Elena Sokolova, and Gleb Vdovin, "Planar double-grating microspectrometer," Opt. Express 15, 3581-3588 (2007)

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