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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 8 — Apr. 16, 2007
  • pp: 4994–5007

Fabrication of a dual-tier thin film micropolarization array

Viktor Gruev, Alessandro Ortu, Nathan Lazarus, Jan Van der Spiegel, and Nader Engheta  »View Author Affiliations


Optics Express, Vol. 15, Issue 8, pp. 4994-5007 (2007)
http://dx.doi.org/10.1364/OE.15.004994


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Abstract

A thin film polarization filter has been patterned and etched using reactive ion etching (RIE) in order to create 8 by 8 microns square periodic structures. The micropolarization filters retain the original extinction ratios of the unpatterned thin film. The measured extinction ratios on the micropolarization filters are ~1000 in the blue and green visible spectrum and ~100 in the red spectrum. Various gas combinations for RIE have been explored in order to determine the right concentration mix of CF4 and O2 that gives optimum etching rate, in terms of speed and under-etching. Theoretical explanation for the optimum etching rate has also been presented. In addition, anisotropic etching with 1μm under cutting of a 10μm thick film has been achieved. Experimental results for the patterned structures under polarized light are presented. The array of micropolarizers will be deposited on top of a custom made CMOS imaging sensor in order to compute the first three Stokes parameters in real time.

© 2007 Optical Society of America

OCIS Codes
(110.5220) Imaging systems : Photolithography
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(230.5440) Optical devices : Polarization-selective devices

ToC Category:
Optical Devices

History
Original Manuscript: November 9, 2006
Revised Manuscript: March 19, 2007
Manuscript Accepted: March 24, 2007
Published: April 10, 2007

Citation
Viktor Gruev, Alessandro Ortu, Nathan Lazarus, Jan Van der Spiegel, and Nader Engheta, "Fabrication of a dual-tier thin film micropolarization array," Opt. Express 15, 4994-5007 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-8-4994


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