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Optics Express

Optics Express

  • Editor: C. Martijin de Sterke
  • Vol. 15, Iss. 9 — Apr. 30, 2007
  • pp: 5827–5842

High numerical aperture imaging with different polarization patterns

N. Lindlein, S. Quabis, U. Peschel, and G. Leuchs  »View Author Affiliations


Optics Express, Vol. 15, Issue 9, pp. 5827-5842 (2007)
http://dx.doi.org/10.1364/OE.15.005827


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Abstract

The modulation transfer function (MTF) is calculated for imaging with linearly, circularly and radially polarized light as well as for different numerical apertures and aperture shapes. Special detectors are only sensitive to one component of the electric energy density, e.g. the longitudinal component. For certain parameters this has advantages concerning the resolution when comparing to polarization insensitive detectors. It is also shown that in the latter case zeros of the MTF may appear which are purely due to polarization effects and which depend on the aperture angle. Finally some ideas are presented how to use these results for improving the resolution in lithography.

© 2007 Optical Society of America

OCIS Codes
(110.4100) Imaging systems : Modulation transfer function
(220.1230) Optical design and fabrication : Apodization
(220.3740) Optical design and fabrication : Lithography
(260.5430) Physical optics : Polarization

ToC Category:
Imaging Systems

History
Original Manuscript: March 2, 2007
Revised Manuscript: April 25, 2007
Manuscript Accepted: April 25, 2007
Published: April 27, 2007

Citation
N. Lindlein, S. Quabis, U. Peschel, and G. Leuchs, "High numerical aperture imaging with different polarization patterns," Opt. Express 15, 5827-5842 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-9-5827


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