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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 11 — May. 26, 2008
  • pp: 7778–7788

High speed interferometric ellipsometer

Chien-Chung Tsai, Hsiang-Chun Wei, Sheng-Lung Huang, Chu-En Lin, Chih-Jen Yu, and Chien Chou  »View Author Affiliations

Optics Express, Vol. 16, Issue 11, pp. 7778-7788 (2008)

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A novel high speed interferometric ellipsometer (HSIE) is proposed and demonstrated. It is based on a novel differential-phase decoder which is able to convert the phase modulation into amplitude modulation in a polarized heterodyne interferometer. Not only high detection sensitivity but also fast response ability on ellipsometric parameters (EP) measurements based on amplitude-sensitive method is constructed whereas different amplitudes with respect to P and S polarized heterodyne signals in this phase to amplitude modulation conversion is discussed. The ability of HSIE was verified by testing a quarter wave plate while a real time differential-phase detection of a liquid crystal device versus applied voltage by using HSIE was demonstrated too. These results confirm that HSIE is able to characterize the optical property of specimen in terms of EP at high speed and high detection sensitivity experimentally.

© 2008 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 3, 2008
Revised Manuscript: May 9, 2008
Manuscript Accepted: May 9, 2008
Published: May 14, 2008

Chien-Chung Tsai, Hsiang-Chun Wei, Sheng-Lung Huang, Chu-En Lin, Chih-Jen Yu, and Chien Chou, "High speed interferometric ellipsometer," Opt. Express 16, 7778-7788 (2008)

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