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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 15 — Jul. 21, 2008
  • pp: 11007–11020

Nondestructive high-resolution soft-boundary profiling based on forward shadow diffraction

Songky Moon, Juhee Yang, Sang-Bum Lee, Jeong-Bo Shim, Sang-Wook Kim, Jai-Hyung Lee, and Kyungwon An  »View Author Affiliations


Optics Express, Vol. 16, Issue 15, pp. 11007-11020 (2008)
http://dx.doi.org/10.1364/OE.16.011007


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Abstract

Nondestructive noncontact high-resolution optical technique for profiling soft or fluidic boundary of an opaque object is presented. Our technique utilizes the fact that the angle width, the angular separation between two adjacent intensity minima in the forward shadow diffraction, is inversely proportional to the projected width of the object in the same direction. An analytic formula for reconstructing the boundary shape is obtained for an object with two-fold symmetry in terms of the angle widths measured for various rotational angles of the object. The typical error in determining the object shape parameter is less than 0.2%, which corresponds to 20 nm of radial accuracy when applied to an object with a mean radius of 10 microns.

© 2008 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(300.1030) Spectroscopy : Absorption
(290.2558) Scattering : Forward scattering
(080.6755) Geometric optics : Systems with special symmetry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 21, 2008
Revised Manuscript: June 26, 2008
Manuscript Accepted: July 6, 2008
Published: July 9, 2008

Citation
Songky Moon, Juhee Yang, Sang-Bum Lee, Jeong-Bo Shim, Sang-Wook Kim, Jai-Hyung Lee, and Kyungwon An, "Nondestructive high-resolution soft-boundary profiling based on forward shadow diffraction," Opt. Express 16, 11007-11020 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-15-11007


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